Reactor Filter Plate and Baffle for Outgassing Containment

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Solution Overview

Problem

Existing filter systems in reactor systems for semiconductor processing can cause contamination due to outgassing of materials, which can affect the reaction chamber and substrates, leading to impurities and degradation of process quality.

Innovation Solution

A filter system comprising a filter vessel with a filter plate and filters, where the filter plate has plate holes and rims that align with filter bores, and a baffle plate to direct fluid flow, minimizing outgassing and ensuring effective contaminant collection and prevention of downstream contamination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If a filter system is used to collect materials from the reaction chamber, then contamination of downstream reactor system components is reduced, but outgassing from the filter system may cause contamination of the reaction chamber or substrate

Engineering Contradiction:

Improvecontamination of downstream componentsVSAvoidoutgassing from filter system

Core Design Contradiction:

Object-affected harmful factorsVSObject-generated harmful factors

Solution Approach 1:

A second filter is introduced as an intermediary component between the reaction chamber and the first filter. This second filter captures outgassing materials before they can reach the first filter or the reaction chamber, effectively mediating the harmful interaction while maintaining the primary filtration function.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The outgassing problem is converted into a beneficial effect by using the outgassed materials to activate or enhance the filtration capability of the second filter. The harmful outgassing is thus transformed into a useful function of capturing and removing contaminants from the gas stream.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

2Reliability

If reactant gases are passed through a filter system, then reaction products and byproducts are trapped to prevent contamination, but materials from the filter system may outgas and contaminate the reaction chamber

Engineering Contradiction:

Improveprevention of contaminationVSAvoidoutgassing contamination

Core Design Contradiction:

ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The second filter serves as an intermediary that captures outgassing materials before they can contaminate the reaction chamber. This mediator approach allows the filter system to maintain its reliability in preventing contamination while addressing the outgassing issue.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The second filter creates a protective inert environment between the reaction chamber and the first filter, preventing harmful outgassing interactions. This inert barrier ensures that any outgassing from the first filter is captured and neutralized before reaching the reaction chamber.

Inventive Principle:

Principle #39Inert atmosphere (Inert environment)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system effectively collects contaminants, reducing the risk of reactor system component contamination and maintaining substrate purity by minimizing outgassing and enhancing the integrity of the reactor environment.

Implementation Method 1

a filter disposed on the filter plate. The filter plate may comprise a first plate face and a second plate face with a plate body spanning therebetween; a first plate hole disposed through the plate body spanning between the first plate face and the second plate face

Methodology Applied

Scientific EffectFiltration: Filter (physical)

Implementation Method 2

a baffle plate disposed on the filter second end, wherein the filter bore is disposed through the filter second end, and the baffle plate prevents or reduces a fluid from entering the filter bore through the filter second end

Methodology Applied

Scientific EffectFluid flow control:

Data Source

PatentUS20250249407A1Filter system for a reactor system

Publication Date: 2025.08.07 ASM IP HLDG BV

AI summary

A filter system of a reactor system may comprise a filter vessel comprising an outer wall; a filter plate disposed in the filter vessel; and a filter disposed on the filter plate. The filter plate may comprise a first plate face and a second plate face with a plate body spanning therebetween; a first plate hole disposed through the plate body spanning between the first plate face and the second plate face; and/or a plate hole rim protruding from the first plate surface. The plate hole rim may be disposed at or proximate a plate hole edge defining the first plate hole, and/or at least partially surrounding the first plate hole. The first filter may be disposed on the first plate face, and the first filter may engage with the plate hole rim such that the plate hole rim positions the first filter in a desired position.