Laminated Rear Passivation Structure for P-Type Solar Cells

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Solution Overview

Problem

The existing production methods for laminated passivation structures in solar cells, particularly for P-type monocrystalline silicon solar cells, face challenges in achieving effective passivation while reducing production costs and minimizing hazardous materials usage, such as trimethylaluminum, which is dangerous and costly.

Innovation Solution

A laminated passivation structure comprising a sequence of dielectric layers on the back surface of a P-type silicon substrate, including a first silicon oxide layer, a second dielectric layer with varying refractive indices to enhance light reflection, and a third dielectric layer to reduce surface recombination, utilizing Plasma Enhanced Chemical Vapor Deposition (PECVD) for deposition, and hydrogen diffusion for passivation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If trimethylaluminum (TMA) is used in the deposition process of aluminum oxide film, then the passivation effect is improved, but the production cost increases and safety hazards arise

Engineering Contradiction:
Improvepassivation effectVSAvoidproduction cost and safety
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent replaces expensive and hazardous trimethylaluminum (TMA) with a cheaper, safer alternative deposition process. The new method uses a different chemical approach that eliminates the need for TMA, thereby reducing both production costs and safety risks while maintaining the passivation functionality of the aluminum oxide film.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The patent changes the deposition parameters and chemical composition used in the aluminum oxide film formation process. By modifying the deposition method to not rely on TMA, the process achieves the same passivation effect with improved cost-effectiveness and safety profile.

Inventive Principle:
Principle #35Parameter changes

2Ease of manufacture

If all-aluminum doping is applied on the back surface to form all-aluminum back field, then the manufacturing process is simplified, but recombination at the metal and silicon contact interface increases and efficiency improvement is limited

Engineering Contradiction:
Improvemanufacturing process simplicityVSAvoidphotoelectric conversion efficiency
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent segments the back field structure by introducing a dielectric layer between the aluminum layer and the silicon substrate. This segmentation separates the electrical function (aluminum contact) from the passivation function (dielectric layer), thereby reducing recombination at the interface while maintaining manufacturing simplicity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent creates a composite structure combining dielectric material and aluminum on the back surface. This composite approach allows the dielectric layer to provide passivation and reduce recombination, while the aluminum layer maintains its electrical functionality, achieving both simplified manufacturing and improved efficiency.

Inventive Principle:
Principle #40Composite materials

3Reliability

If back passivation film and local aluminum back field technology are introduced, then open-circuit voltage and short-circuit current are improved, but the process complexity increases

Engineering Contradiction:
Improveopen-circuit voltage and short-circuit currentVSAvoidprocess complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges the passivation function and the back field formation into a single integrated process step. By combining these functions, the patent achieves improved open-circuit voltage and short-circuit current without proportionally increasing process complexity, as the merged structure performs multiple functions simultaneously.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The laminated passivation structure achieves improved open-circuit voltage, short-circuit current, and conversion efficiency, with enhanced chemical and bulk passivation effects, reducing production costs and hazards.

Implementation Method 1

utilizing Plasma Enhanced Chemical Vapor Deposition (PECVD) for deposition

Methodology Applied
Scientific EffectPlasma Enhanced Chemical Vapor Deposition: Plasma Enhanced Chemical Vapour Deposition

Implementation Method 2

hydrogen diffusion for passivation

Methodology Applied
Scientific EffectDiffusion: Diffusion

Implementation Method 3

increasing the long-wave reflection of the back surface

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS12563856B2Laminated passivation structure of solar cell and preparation method thereof
Publication Date: 2026.02.24 HANWHA SOLUTIONS CORP
  • US12563856B2 patent drawing
  • US12563856B2 patent drawing
  • US12563856B2 patent drawing

AI summary

A laminated passivation structure of solar cell and a preparation method thereof are disclosed herein. The laminated passivation structure of solar cell includes a P-type silicon substrate, a first dielectric layer, a second dielectric layer, and a third dielectric layer sequentially arranged on the back side of the P-type silicon substrate from inside to outside. The preparation method includes generating a first dielectric layer on the back surface of the P-type silicon substrate, and then sequentially depositing a second dielectric layer and a third dielectric layer on the first dielectric layer.