Detector assembly, charged particle device, apparatus, and methods
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Detector assemblies in charged particle beam inspection tools face contamination issues that affect their ability to detect signal particles emitted from samples, leading to reduced accuracy and efficiency in defect detection during semiconductor manufacturing.
Innovation Solution
A detector assembly with recessed surfaces between electrode elements is designed to reduce contamination, featuring a plurality of electrode elements with recessed areas behind the detection elements, allowing for effective detection of signal particles while minimizing interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the detector surface is exposed to signal particles, then detection capability is improved, but contamination builds up on the detector surface
Solution Approach 1:
The patent introduces a third dimension by creating recesses behind the detector elements, allowing signal particles to be detected from a different spatial dimension. The recesses extend in the direction of the primary beam, enabling detection of particles that would otherwise be blocked or contaminated the front surface.
Solution Approach 2:
The recesses act as intermediaries that guide signal particles from the sample surface to the detector elements. By positioning the detector elements behind the recesses, the system mediates between the signal particles and the detector, reducing direct exposure of the detector surface to contamination while maintaining detection capability.
2Productivity
If the detector elements are positioned to maximize signal particle collection, then detection efficiency is improved, but the detector becomes more susceptible to contamination
Solution Approach 1:
The patent repositions detector elements in the third dimension by placing them behind recesses, allowing efficient signal particle collection while reducing surface exposure. This dimensional change enables the detector to maintain high detection efficiency without direct front-surface contact with contaminated environments.
Solution Approach 2:
The recesses create localized detection zones with different contamination characteristics. Each recessed detector element has a protected local environment that reduces contamination exposure while maintaining signal particle detection capability, allowing different parts of the detector to have different exposure characteristics.
3Ease of manufacture
If the detector design is simplified for manufacturing, then ease of manufacture is improved, but contamination protection is reduced
Solution Approach 1:
The patent segments the detector structure into separate components: the detector elements and the recesses. This segmentation allows each component to be manufactured independently using standard semiconductor fabrication techniques, then assembled together, maintaining manufacturing simplicity while achieving contamination protection through the recessed configuration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances the detection of signal particles by reducing contamination, improving the accuracy and efficiency of defect detection in semiconductor manufacturing processes, thereby increasing yield and throughput.
Implementation Method 1
at least one of the electrode elements is a detection element configured to detect signal particles
Data Source
AI summary
The present application discloses detector assembly for a charged particle assessment apparatus, the detector assembly comprising a plurality of electrode elements, each electrode element having a major surface configured to be exposed to signal particles emitted from a sample, wherein between adjacent electrode elements is a recess that is recessed relative to the major surfaces of the electrode elements, and wherein at least one of the electrode elements is a detection element configured to detect signal particles and the recess extends laterally behind the detection element. Charged particle assessment devices and apparatus, and corresponding methods are also provided.