Recessed Intermediate Layer Humidity Sensor Design
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Solution Overview
Problem
Existing sensors face challenges in detecting humidity with high sensitivity and response rate due to limitations in the design of electrodes and intermediate layers, leading to inefficient capacitance changes and prolonged response times.
Innovation Solution
The sensor design includes a first sensor part with a recessed intermediate layer between the electrode and counter electrode, featuring a high surface area for water adsorption, and a non-overlap region to enhance capacitance changes, utilizing materials with low hygroscopicity for the electrodes and a hygroscopic intermediate layer, such as polyimide or silicon oxide, to improve detection accuracy and speed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional sensor design with flat intermediate layer is used, then the structure is simple, but the detection sensitivity and response rate are insufficient
Solution Approach 1:
The intermediate layer is designed with a recessed portion that extends in the depth dimension (from first electrode toward second electrode), transforming a two-dimensional flat structure into a three-dimensional recessed structure. This dimensional change increases the surface area for water adsorption and enhances capacitance change without significantly complicating the overall sensor structure
Solution Approach 2:
The intermediate layer is designed with a recessed portion that creates a porous or cavity structure, increasing the surface area available for water adsorption. This porous configuration enhances the interaction between water molecules and the intermediate layer, improving detection sensitivity and response rate
2Productivity
If the intermediate layer has large surface area for water adsorption, then the response rate improves, but the capacitance changes more due to humidity which may cause non-humidity-related interference
Solution Approach 1:
Different regions of the sensor structure are assigned different functions: the recessed portion of the intermediate layer is designed with high water adsorption capacity for rapid response, while the electrode and counter electrode structures are optimized to minimize non-humidity-related capacitance changes. This local differentiation allows the sensor to achieve both fast response and high reliability
Solution Approach 2:
The sensor employs a composite structure combining the intermediate layer with specific electrode materials and configurations. The intermediate layer provides high water adsorption for fast response, while the electrode structure (including the recessed portion and non-overlap region) is designed to suppress non-humidity capacitance changes, creating a composite system that balances response rate and detection accuracy
3Measurement precision
If the electrode and counter electrode overlap completely, then the capacitance is stable, but the capacitance change due to humidity is reduced
Solution Approach 1:
The electrode and counter electrode structures are segmented into different regions: an overlapping region that provides stable baseline capacitance, and a non-overlapping region (including the recessed portion) that enhances humidity-induced capacitance change. This segmentation allows the sensor to maintain both stability and sensitivity
Solution Approach 2:
Different regions of the electrode structure serve different functions: the overlapping region provides stable capacitance for reliable baseline measurement, while the non-overlapping region (particularly the recessed portion of the intermediate layer) is designed to maximize capacitance change in response to humidity, achieving both stability and sensitivity through local functional differentiation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for high-sensitivity and rapid detection of humidity changes, suppressing non-humidity-related capacitance changes and providing accurate, fast response times.
Implementation Method 1
a first intermediate layer located between the first electrode and the first counter electrode... a first intermediate layer side surface being recessed when referenced to the first electrode side surface
Data Source
AI summary
According to one embodiment, a sensor includes a first sensor part. The first sensor part includes a first electrode, a first counter electrode, and a first intermediate layer located between the first electrode and the first counter electrode. The first counter electrode includes a first electrode side surface. The first electrode side surface crosses a first cross direction. The first cross direction crosses a first direction from the first electrode toward the first counter electrode. The first intermediate layer includes a first intermediate layer side surface. The first intermediate layer side surface crosses the first cross direction. The first intermediate layer side surface is recessed when referenced to the first electrode side surface.