Recessed Nozzle Installation for Substrate Processing Uniformity
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Solution Overview
Problem
Batch type substrate processing apparatuses face limitations due to dead volume at gas injection nozzle installations, leading to residual process gases, uneven gas flow rates, and reduced substrate processing uniformity.
Innovation Solution
A substrate processing apparatus with a reaction tube and nozzle installation part that includes insertion parts for gas injection nozzles, minimizing dead volume by ensuring proper alignment and installation of nozzles, and an outer tube to create an exhaust space for improved gas flow.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple gas injection nozzles are installed at a protruding injection nozzle installation position inside the reaction tube to inject process gas, then substrate processing can be performed, but dead volume is formed at the installation position causing process gases to remain and creating particle factors
Solution Approach 1:
The patent extracts the harmful dead volume by making the nozzle installation position recessed rather than protruding. The nozzles are installed in a recessed portion of the reaction tube, which eliminates the formation of dead volume where process gases would otherwise remain and create particle factors.
Solution Approach 2:
Instead of the conventional protruding nozzle installation position that creates dead volume, the patent inverts the design by using a recessed installation position. This inversion of the installation geometry fundamentally prevents the accumulation of residual gases.
2Productivity
If multiple gas injection nozzles are installed at a protruding injection nozzle installation position, then gas injection can be performed, but uniformity is lowered due to insufficient flow rate and positional differences in gas injection
Solution Approach 1:
The patent removes the problematic protruding installation structure that caused non-uniform gas flow. By recessing the nozzle installation position into the reaction tube wall, the design eliminates the dead volume that created flow rate variations and positional inconsistencies in gas injection.
3Ease of manufacture
If a protruding nozzle installation position is used inside the reaction tube, then nozzles can be installed for process gas injection, but dead volume forms causing process gases to remain and create byproducts
Solution Approach 1:
The patent extracts the dead volume problem by inverting the installation geometry from protruding to recessed. The nozzles are installed in a recessed portion of the reaction tube, which eliminates the space where process gases would accumulate and form harmful byproducts.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design reduces residual gas concentration, enhances gas flow uniformity, and improves substrate processing quality by minimizing dead volume around the gas injection nozzles, leading to better step coverage and processing uniformity.
Implementation Method 1
a plurality of gas injection nozzles (300) disposed along a circumference of each of the substrate (1) in a direction perpendicular to the nozzle installation part (200) to inject a process gas into the reaction tube (100)
Data Source
AI summary
The present invention disclosed herein relates to a substrate processing apparatus, and more particularly, to a substrate processing apparatus capable of performing substrate processing such as deposition, etching, and heat processing on a plurality of substrates. The present invention discloses a substrate processing apparatus including a reaction tube having a processing space, in which a plurality of substrates are accommodated to perform substrate processing, a nozzle installation part protruding outward from a portion of a side surface of the reaction tube to provide a portion of an outer surface of the reaction tube, and a plurality of gas injection nozzles disposed along a circumference of each of the substrate in a direction perpendicular to the nozzle installation part to inject a process gas into the reaction tube, wherein the nozzle installation part comprises a plurality of insertion parts corresponding to the gas injection nozzles.