Chronological Recipe Comparison Screen for Semiconductor Failure Analysis
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Solution Overview
Problem
In semiconductor manufacturing, it is challenging to quickly determine the cause of failures that occur due to differences in process recipes, as existing methods require significant time to organize and analyze recipe data.
Innovation Solution
An information processing apparatus and method that acquires and displays process data from different recipes chronologically, allowing for side-by-side comparison on a single display, thereby facilitating the identification of trends and failure causes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If process data from different recipes is displayed separately requiring data collection and analysis, then measurement precision of recipe trends is improved, but loss of time increases significantly
Solution Approach 1:
The patent combines multiple recipe data displays into a single integrated screen showing chronological process data from different recipes side-by-side. This merging eliminates the need to separately collect and analyze data from multiple sources, enabling immediate visual comparison of recipe trends while maintaining measurement precision and significantly reducing failure analysis time.
Solution Approach 2:
The patent introduces a new display dimension by organizing recipe data chronologically across different regions of a single screen rather than requiring sequential access to separate data collections. This dimensional reorganization allows simultaneous visualization of multiple recipes' temporal patterns, enabling rapid trend identification without time loss.
2Ease of operation
If process data is organized by lots including multiple substrates, then ease of operation is improved for identifying failed lots, but difficulty of detecting and measuring recipe-specific trends increases
Solution Approach 1:
The patent segments the display into different regions, each showing chronological process data for a specific recipe. This segmentation maintains the ease of identifying failed lots by recipe while enabling simultaneous detection of recipe-specific trends through visual comparison across segmented regions, resolving the difficulty of detecting recipe trends when data is aggregated by lots.
Data Source
AI summary
An information processing apparatus includes a processor and a memory for storing instructions to be executed by the processor, wherein the instructions stored in the memory are executed by the processor to acquire information containing first process data indicating a result of a substrate process in a first recipe and second process data indicating a result of a substrate process in a second recipe different from the first recipe, and control a display on a display apparatus based on the acquired information, and wherein control is performed to display, on the display apparatus, a first screen displaying a first data group in which the first process data is arranged chronologically and a second data group in which the second process data is arranged chronologically, the first screen displaying the first data group in a region and the second data group in another region.