Production Equipment Recipe Control for Parallel Parsing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In automatic semiconductor production control systems, the sequential execution of control instructions by multiple production equipment leads to increased equipment idle time and reduced production efficiency, as the equipment cannot start production until all recipe data are checked.
Innovation Solution
A control method and apparatus that allow for parallel parsing and uploading of recipe data by generating multiple control instructions and parsing recipe data in parallel, reducing the time required for data parsing and equipment idle time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If sequential execution of control instructions is used to ensure data accuracy, then reliability is improved, but productivity deteriorates
Solution Approach 1:
The patent segments the recipe data parsing process into multiple independent parallel tasks, where different production equipment uploads and parses recipe data simultaneously rather than sequentially. This segmentation allows the system to maintain data accuracy through proper task coordination while significantly improving overall processing throughput and production efficiency.
Solution Approach 2:
The patent merges multiple recipe data upload and parsing operations into a single parallel execution framework. By combining these operations under unified control instructions that enable simultaneous execution, the system achieves both data reliability through centralized coordination and improved productivity through parallel processing of multiple equipment recipes.
2Reliability
If sequential parsing of recipe data is used to ensure processing accuracy, then reliability is improved, but loss of time worsens
Solution Approach 1:
The patent implements preliminary action by having production equipment upload recipe data in advance while parallel parsing operations are initiated. The control system generates multiple control instructions that enable equipment to prepare and upload data concurrently, reducing idle time while maintaining processing accuracy through coordinated execution of parsing tasks.
Solution Approach 2:
The patent ensures continuity of useful action by enabling overlapping execution of recipe data upload and parsing operations across multiple equipment. Instead of idle waiting periods between sequential operations, the system maintains continuous productive activity through parallel processing, reducing equipment idle time while preserving data accuracy through proper task synchronization.
Data Source
AI summary
Embodiments relate to a control method, apparatus, system, device and medium for production equipment. The method includes: receiving a recipe upload instruction, and generating a first control instruction in response to the recipe upload instruction to control the production equipment to upload first recipe data; receiving the first recipe data, and parsing the first recipe data to generate a corresponding first recipe file in a preset format; generating a second control instruction during parsing the first recipe data to control the production equipment to upload second recipe data; and receiving the second recipe data, and parsing the second recipe data to generate a corresponding second recipe file in a preset format.