Substrate Recipe Editing With Time-Series Control Value Visualization
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Solution Overview
Problem
In substrate processing, editing recipes is inefficient due to difficulties in grasping changes in control values calculated from time-series parameters, leading to decreased work efficiency.
Innovation Solution
A substrate processing apparatus and method that includes a calculator to calculate control values for setting items in the substrate processing condition and a controller to display time-series data, allowing operators to visualize and adjust settings effectively during recipe editing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If various parameters are set for each step in recipe editing, then the substrate processing condition can be defined in detail, but it becomes difficult to grasp changes in control values calculated from time-series parameters
Solution Approach 1:
The patent introduces a calculator as an intermediary component that automatically computes control values from the various parameters set in each recipe step. This mediator translates the detailed parameter settings into comprehensible control values, allowing operators to define precise processing conditions while maintaining visibility of the resulting control behavior through time-series display.
Solution Approach 2:
The system implements feedback by displaying the calculated control values in time-series format alongside the recipe steps. This visual feedback mechanism allows operators to immediately see how their parameter settings translate into actual control behavior, enabling them to grasp changes in control values while maintaining detailed parameter definition capability.
2Manufacturing precision
If detailed parameters are configured for each recipe step, then processing accuracy is improved, but work efficiency during recipe editing decreases
Solution Approach 1:
The calculator performs automatic computation of control values from the configured parameters without requiring manual calculation or additional operator effort. This self-service mechanism handles the complex computational task internally, allowing operators to focus on setting parameters while the system automatically generates and displays the corresponding control values, thereby maintaining precision while improving editing efficiency.
Solution Approach 2:
The patent replaces the manual mechanical process of calculating and tracking control values with an automated computational system. The calculator automatically computes control values from time-series parameters and displays them, substituting the operator's manual tracking effort with an automated information processing system that provides real-time visibility of control changes.
Data Source
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AI summary
There is provided a technique that includes: a substrate processor configured to process a substrate according to a recipe including at least one step defining a substrate processing condition; an operator configured to receive an editing operation for at least one setting item included in the substrate processing condition; a calculator configured to calculate a control value for a setting value of the at least one setting item in conformity with an edited substrate processing condition obtained by the editing operation; and a controller configured to be capable of controlling a displayer to display time-series data of the control value calculated by the calculator together with information about the at least one step.