Substrate Recipe Editing Layout for Cross-Step Settings Verification
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Solution Overview
Problem
The existing substrate processing apparatuses face inefficiencies during recipe editing due to the need to switch between steps to check settings, leading to decreased operational efficiency.
Innovation Solution
A technique that allows for a different display mode for steps undergoing editing operations, enabling side-by-side display of step and processing condition information, and controlling the display to differentiate edited steps from non-edited ones, thereby improving editing workability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If settings that affect other steps are made when editing a selected step, switching between steps is performed to check the settings, then the settings can be verified, but operational efficiency during recipe-editing decreases
Solution Approach 1:
The patent transitions from a one-dimensional sequential step display to a two-dimensional matrix layout where steps are arranged in rows and columns. This allows operators to view multiple steps simultaneously in different spatial dimensions, enabling verification of settings across steps without sequential switching, thus resolving the contradiction between verification accuracy and operational efficiency
Solution Approach 2:
The patent merges the display of step information and processing condition information into a single integrated screen. By combining these previously separate displays, operators can verify settings and view step information simultaneously without switching between different screens or modes, improving operational efficiency while maintaining verification accuracy
2Device complexity
If all steps are displayed in the same manner on the screen, then the display is simple, but it becomes difficult to identify which step is currently being edited
Solution Approach 1:
The patent applies local quality by giving the currently edited step a distinct visual appearance (different color or highlight) compared to other steps in the matrix display. This localized differentiation maintains the overall simplicity of the display while clearly indicating which step is being edited, resolving the contradiction between display simplicity and editing status visibility
Solution Approach 2:
The patent uses color changes to differentiate the currently edited step from other steps in the display. By changing the color or visual properties of the active step, operators can easily identify which step is being edited without complicating the overall display structure, thus maintaining simplicity while improving ease of operation
Data Source
AI summary
There is provided a technique that includes: a recipe including a plurality of steps for which a processing condition for a substrate is defined; a display capable of displaying at least one selected from information on the plurality of steps included in the recipe and information on the processing condition of at least one step selected from the plurality of steps; an operator configured to perform an editing operation for the processing condition; and a controller capable of controlling information on a step for which the editing operation for the processing condition is performed to be displayed in a different manner from information on a step for which the editing operation is not performed.