Recipe Editing Interface for Substrate Processing Step Verification
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Solution Overview
Problem
The operational efficiency during recipe-editing in substrate processing apparatuses is decreased due to the need to switch between steps to check settings, leading to inefficiencies in managing and editing processing conditions.
Innovation Solution
A controlling apparatus that displays selected steps and processing conditions in a differentiated manner, allowing for side-by-side display of step and processing-condition information, enabling easier editing and management of settings through distinct icons and icons for editing status, thereby improving operational efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If settings that affect other steps are made when editing a selected step, switching between steps is performed to check the settings, then the settings can be verified, but operational efficiency during recipe-editing decreases
Solution Approach 1:
The patent combines the display of multiple step information and processing conditions into a single integrated screen. The display unit shows both the selected step's processing conditions and other steps' information simultaneously, eliminating the need to switch between screens while verifying settings, thus resolving the contradiction between verification accuracy and operational efficiency
Solution Approach 2:
The patent transitions from a sequential, single-step display approach to a multi-dimensional display that shows multiple steps and their conditions concurrently. By organizing information in a spatial layout that accommodates multiple steps and their interrelationships on one screen, the system enables comprehensive verification without temporal switching, improving operational efficiency while maintaining verification accuracy
2Loss of information
If all steps and processing conditions are displayed in detail, then complete information is available, but display complexity and information management difficulty increase
Solution Approach 1:
The patent segments the display into distinct functional regions: a first region for displaying multiple steps and a second region for displaying processing conditions. This segmentation allows complete information to be presented while organizing it in a structured, manageable layout that reduces perceived complexity and improves information retrieval efficiency
Solution Approach 2:
The patent applies different display characteristics to different regions of the interface. The first region displays step information with specific formatting, while the second region displays processing conditions with different formatting. This local differentiation allows comprehensive information display while maintaining visual organization and reducing overall display complexity through consistent regional patterns
Data Source
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AI summary
There is provided a technique that includes: a recipe including a plurality of steps for which a processing condition for a substrate is defined; a display capable of displaying at least one selected from information on the plurality of steps included in the recipe and information on the processing condition of at least one step selected from the plurality of steps; an operator configured to perform an editing operation for the processing condition; and a controller capable of controlling information on a step for which the editing operation for the processing condition is performed to be displayed in a different manner from information on a step for which the editing operation is not performed.