Recipe and Layout Display for Faster Substrate Processing Search

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Solution Overview

Problem

As the number of recipe data pieces increases in substrate processing, operators face significant time challenges in searching and finding the intended recipe data, leading to inefficiencies in generating new data.

Innovation Solution

An information processing apparatus is configured to acquire and display recipe data and layout data in association with each other on a user interface, enabling operators to search for recipe data more efficiently by classifying and displaying related information side by side, using visual aids like layout images and distinct colors to facilitate quick identification.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the number of recipe data pieces is increased to support diverse substrate processing, then the capability to handle diverse articles is improved, but the time required for searching and finding intended recipe data increases

Engineering Contradiction:

Improvecapability to handle diverse articlesVSAvoidtime required for searching recipe data

Core Design Contradiction:

Adaptability or versatilityVSLoss of time

Solution Approach 1:

The patent segments the large volume of recipe data into groups based on layout data characteristics. By dividing the monolithic data set into manageable segments organized by layout patterns, the system enables operators to search within smaller, categorized groups rather than browsing through all recipe data, thus reducing search time while maintaining the ability to handle diverse articles

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent creates and displays temporary layout images generated from layout data to assist in the search process. These visual representations serve as disposable aids that help operators quickly identify the intended recipe data without permanently altering the system or requiring complex permanent visualization structures for all data

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

2Device complexity

If recipe data is displayed without visual aids, then the display complexity is reduced, but the ease of identifying intended recipe data deteriorates

Engineering Contradiction:

Improvedisplay complexityVSAvoidease of identifying recipe data

Core Design Contradiction:

Device complexityVSEase of operation

Solution Approach 1:

The patent utilizes color changes in displaying layout images to highlight key features and distinguish between different layout patterns. By applying color coding to visual elements, the system enhances the ease of identifying intended recipe data through intuitive visual cues without significantly increasing display complexity

Inventive Principle:

Principle #32Color changes

Solution Approach 2:

The patent transforms two-dimensional layout data into visual layout images that can be displayed on the screen. By converting abstract data into visual representations, the system adds a visual dimension that makes recipe data identification easier while maintaining manageable display complexity through standard graphical interface techniques

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS11645796B2Information processing apparatus, display control method, storage medium, substrate processing apparatus, and manufacturing method of article

Publication Date: 2023.05.09 CANON KK

AI summary

An information processing apparatus configured to control display on a user interface includes an acquisition unit configured to acquire recipe data regarding a processing condition of a substrate processing apparatus configured to process a substrate and layout data regarding a layout of a processed portion of the substrate processed by the substrate processing apparatus, and a display control unit configured to perform control to display, on the user interface, information regarding the layout data and information regarding the recipe data related to the layout data, the layout data and the recipe data being acquired by the acquisition unit, in association with each other.