Recipe and Layout Search Interface for Substrate Processing
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Solution Overview
Problem
The increasing number of data pieces in recipe data for substrate processing apparatuses complicates the search for intended recipe data, leading to prolonged search times for operators.
Innovation Solution
An information processing apparatus that displays recipe data in association with layout data on a search screen, allowing operators to efficiently search for recipe data by visualizing the relationship between the two.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the number of recipe data pieces is increased to support diverse substrate processing, then the comprehensiveness of processing coverage is improved, but the search time for intended recipe data increases
Solution Approach 1:
A search condition input unit serves as an intermediary between the operator and the large database of recipe data. The operator inputs search conditions (article type, manufacturing step, substrate processing apparatus), and the system mediates by automatically retrieving and displaying matching recipe data, eliminating the need for operators to manually search through numerous data pieces.
Solution Approach 2:
The system provides feedback by displaying search results that match the input conditions. The display unit shows retrieved recipe data with identifiers and layout information, allowing operators to verify results and refine searches if needed, creating a feedback loop that reduces search time while maintaining comprehensive access to all recipe data.
2Ease of operation
If recipe data is displayed without associated layout data, then the display simplicity is improved, but the search efficiency for intended recipe data deteriorates
Solution Approach 1:
The display is segmented into distinct regions: a search condition input region, a result display region, and within the result display, separate areas for recipe data identifiers and associated layout data. This segmentation allows the interface to remain simple and organized while providing comprehensive search capabilities and visual feedback through layout thumbnails.
Solution Approach 2:
The system adds a visual dimension to recipe data search by displaying layout thumbnails alongside recipe identifiers. This transforms the search from a purely text-based one-dimensional task into a two-dimensional visual search, allowing operators to quickly identify intended recipe data through visual cues about substrate layouts, thereby improving search efficiency without complicating the interface.
Data Source
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AI summary
An information processing apparatus configured to control display on a user interface includes an acquisition unit configured to acquire recipe data regarding a processing condition of a substrate processing apparatus configured to process a substrate and layout data regarding a layout of a processed portion of the substrate processed by the substrate processing apparatus, and a display control unit configured to perform control to display, on the user interface, information regarding the layout data and information regarding the recipe data related to the layout data, the layout data and the recipe data being acquired by the acquisition unit, in association with each other.