Recipe Selection Interface for Semiconductor Substrate Processing

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing processing apparatuses lack an efficient method to easily identify and manage recipe selection and combination information, which is crucial for substrate processing in semiconductor device manufacturing.

Innovation Solution

A controller is configured to display a recipe selection image with a recipe selection area and a recipe editing image with a management information display area and a combination information editing area, allowing for easy selection, management, and editing of recipes and their associated information.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of information

If a technique for displaying a recipe and combination information is used, then information completeness is improved, but information identifiability deteriorates

Engineering Contradiction:

Improverecipe and combination informationVSAvoidrecipe identifiability

Core Design Contradiction:

Loss of informationVSDifficulty of detecting and measuring

Solution Approach 1:

The display screen is segmented into multiple distinct areas: a recipe selection area displaying multiple recipe indicators, and a recipe editing area displaying detailed combination information. This spatial segmentation allows operators to easily identify and access specific recipe information without being overwhelmed by all information at once, resolving the contradiction between information completeness and identifiability.

Inventive Principle:

Principle #1Segmentation

2Loss of information

If multiple recipes and sub-recipes are displayed together, then information completeness is improved, but operational complexity increases

Engineering Contradiction:

Improverecipe informationVSAvoidrecipe selection and management

Core Design Contradiction:

Loss of informationVSEase of operation

Solution Approach 1:

The display is divided into a recipe selection area showing multiple recipe indicators and a recipe editing area showing detailed information. This segmentation allows operators to first select from multiple recipes visually, then access detailed combination information separately, making operation easier while maintaining information completeness.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The interface transitions from a single-dimension list to a two-dimensional layout with horizontal recipe selection and vertical detail display. This dimensional change organizes complex recipe information into a more manageable spatial structure, improving ease of operation.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS20250077057A1Processing apparatus, substrate processing apparatus, display method, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

Publication Date: 2025.03.06 KOKUSAI DENKI KK

AI summary

A technique for identifying a recipe and combination information associated with the recipe in a processing apparatus. The technique includes: a controller for displaying a recipe selection image including a recipe selection area and a recipe editing image including a management information display area and a combination information editing area, wherein the recipe selection area includes a plurality of recipes including sub-recipes or main recipes are displayed therein, wherein the management information display area is configured such that, when one of the plurality of indicators is selected on the recipe selection image, one of the plurality of recipes associated with it is capable of being displayed therein, and wherein the combination information editing area is configured such that combination information linked to the one of the plurality of recipes displayed in the management information display area is capable of being displayed therein.