Recipe Step Tree Visualization for Substrate Process Comparison
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Solution Overview
Problem
Existing substrate processing methods lack a clear understanding of the relationships among various processing steps in multiple recipes, making it difficult to compare and optimize processing results.
Innovation Solution
A computer program and information processing device that visualize the relationships among processing steps by grouping and branching graphic images of processing steps based on common and different conditions, using a tree-like structure, and adjust colors to represent processing conditions and results.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If multiple recipes and processing steps are recorded in a database for substrate processing optimization, then the quantity of processing data increases, but the clarity of relationships among processing steps deteriorates
Solution Approach 1:
The patent segments the complex database of processing steps by creating a hierarchical tree structure that divides processing data into distinct branches based on recipe types and processing step sequences. This segmentation allows multiple recipes to be organized into manageable groups, maintaining data quantity while improving relationship clarity through structured division of the information space.
Solution Approach 2:
The patent introduces a visual dimensional representation by displaying processing step relationships in a tree-shaped graphical interface. This transforms the flat, multi-dimensional database structure into a two-dimensional visual hierarchy where parent-child relationships between processing steps are spatially represented, enabling users to comprehend complex relationships through visual spatial arrangement rather than navigating raw data tables.
2Loss of information
If various processing results are recorded for different recipes, then the amount of information increases, but the difficulty of comparing processing results increases
Solution Approach 1:
The patent merges multiple processing result datasets into a unified tree-structured visualization where corresponding processing steps from different recipes are aligned in parallel branches. This merging approach maintains all individual result data while presenting them in a coordinated structure that enables direct comparison across recipes by displaying equivalent processing steps at the same hierarchical level.
Solution Approach 2:
The patent employs color-coded visual indicators to represent different processing conditions and results across recipes. By assigning color codes to specific processing parameters or outcome states, the system enables rapid visual comparison of processing results without requiring detailed numerical analysis, thus reducing comparison difficulty while preserving comprehensive information.
3Loss of information
If processing steps are displayed in detail for each recipe, then the completeness of information is improved, but the complexity of the display increases
Solution Approach 1:
The patent implements a dynamic display system where the tree structure can be interactively expanded and collapsed. Users can navigate from high-level recipe overviews to detailed processing step compositions by expanding specific branches, and condense information by collapsing branches. This dynamic behavior allows the display to adapt its complexity level based on user needs, maintaining complete information availability while managing display complexity through controlled detail revelation.
Data Source
AI summary
The present disclosure provides a non-transitory computer-readable storage medium, an information processing method, and an information processing device that clarify a relationship among a plurality of processing steps included in a plurality of recipes. The non-transitory computer-readable storage medium having computer-executable instructions stored thereon, which when executed by a processor, cause the processor to perform a method including acquiring a plurality of recipe data related to a plurality of recipes, each of the plurality of recipes including processing steps executed sequentially for processing a substrate, the plurality of the recipe data including contents of each processing step and a processing result of each processing step, and arranging graphic images representing the processing steps included in the plurality of the recipes based on the plurality of the recipe data in an order in which the processing steps are executed, and displaying the graphic images in a tree shape such that the processing steps having common contents across the recipes are grouped into one group and the processing steps having different contents are branched.