Semiconductor Recipe Timing Chart Editing Across Process Steps
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Solution Overview
Problem
In substrate processing apparatuses, editing recipes is inefficient due to difficulties in grasping changes across steps and identifying set parameters, leading to decreased work efficiency and increased editing errors.
Innovation Solution
A technique that displays a recipe editing screen with a selection screen area for parameter selection and a parameter editing screen area for editable timing charts, allowing operators to edit parameters by changing timing charts according to operation instructions, thereby improving operability and reducing errors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If all settable items are displayed in the recipe editing screen, then complete parameter information is available, but it becomes difficult to identify which items are set and reduces work efficiency
Solution Approach 1:
The recipe editing screen is segmented into multiple functional areas: a timing chart display area showing process timing information, a parameter list area displaying available parameters, and a detailed parameter editing area. This segmentation allows operators to view timing charts and parameter lists separately from detailed parameter settings, making it easier to identify which parameters are set while maintaining access to complete parameter information.
Solution Approach 2:
A timing chart serves as an intermediary visual element between the process steps and parameter settings. The timing chart displays timing information for each process step, allowing operators to quickly identify which steps have parameters set without being overwhelmed by the complete list of all possible parameters. This intermediary visualization bridges the gap between complete parameter information and easy identification.
2Manufacturing precision
If parameters are edited step-by-step without visualization, then detailed editing is possible, but changes across steps cannot be grasped and editing errors increase
Solution Approach 1:
The patent adds a temporal dimension to the parameter editing interface by displaying timing charts that show when parameters are applied across different process steps. Instead of editing parameters in isolation, operators can visualize the timing and sequence of parameter applications, providing contextual awareness of changes across steps while maintaining detailed editing capability.
Solution Approach 2:
The timing chart provides immediate visual feedback showing the timing and effect of parameter settings across different process steps. When operators edit parameters, the timing chart updates to reflect these changes, allowing operators to grasp the overall impact of parameter changes across steps and identify potential editing errors before finalizing the recipe.
Data Source
AI summary
There is provided a technique that includes: displaying a recipe editing screen including at least a selection screen area that displays a parameter list for selection of parameters included in a recipe of a substrate processing apparatus, and a parameter editing screen area that edits the parameters; receiving a selection operation that selects an editing target parameter from the parameter list; displaying, on the parameter editing screen area, in an editable manner, a timing chart that is changeable at a time of each process in a series of processes included in a substrate processing process; and editing the editing target parameter by receiving an operation instruction to edit the timing chart displayed on the parameter editing screen area and changing the timing chart according to the operation instruction.