Recipe Transition History Display for Substrate Processing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In substrate processing apparatuses, the history of recipe transitions and the factors causing these transitions are not clearly visible, leading to increased troubleshooting time, especially for beginners, as the distinction between intended and error-induced reset recipes is unclear.
Innovation Solution
The apparatus includes control means for storing and displaying recipes, with display control mechanisms that show the current and previously executed recipes along with the factors triggering their execution on the operation screen, enabling operators to quickly grasp recipe transitions and reduce troubleshooting time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If only the current recipe is displayed on the operation screen, then the display is simple and clear, but the history of recipe transitions and execution factors cannot be grasped
Solution Approach 1:
The patent adds a temporal dimension to the display by showing not only the current recipe but also the sequence of previously executed recipes and their transition factors. This transforms a single-state display into a multi-state historical record, allowing operators to trace recipe transitions without complicating the basic display structure.
Solution Approach 2:
The display is segmented into distinct sections: current recipe information, execution history, and transition factors. This segmentation allows each piece of information to be presented clearly without overwhelming the operator, resolving the contradiction between providing comprehensive information and maintaining display simplicity.
2Loss of time
If detailed recipe history and transition factors are displayed, then troubleshooting time is reduced, but the operation screen becomes cluttered and harder to read
Solution Approach 1:
The patent extracts only the essential troubleshooting information (recipe transition history and execution factors) and displays it in a focused manner. Rather than showing all possible operational details, it selectively presents the specific information needed for troubleshooting, reducing screen clutter while maintaining readability.
3Ease of operation
If the apparatus displays only basic recipe execution status, then the system is simple to operate, but beginners cannot quickly identify the cause of troubles
Solution Approach 1:
The system preliminarily processes and stores recipe transition history and execution factor information during normal operation. When troubleshooting is needed, this pre-collected information is immediately available for display, allowing beginners to quickly identify trouble causes without the system becoming more complex during critical moments.
Data Source
AI summary
A substrate processing apparatus which can securely show the status of recipe transition is provided. In a substrate processing apparatus 100 including a main control unit 312 which sends a control instruction to process a substrate, and a sub control unit 314 which carries out control of the apparatus in accordance with the control instruction from main control unit 312, the main control unit 312 has a memory unit 317 which stores plural recipes, a display control unit 336 which accepts an execution instruction to cause an arbitrary recipe of the plural recipes to be executed, and a display unit 334 which displays the arbitrary recipe designated by the display control unit 336, on an operation screen 308. When an execution instruction to cause another recipe stored in the recipe storage means to be executed is received during the execution of the arbitrary recipe, the arbitrary recipe and this another recipe are displayed on the operation screen 308 together with a factor which has generated the execution instruction to cause this another recipe to be executed.