Recipe Trend Graphing for Faster Semiconductor Failure Analysis
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Solution Overview
Problem
Existing semiconductor manufacturing systems face challenges in quickly determining the cause of failures due to recipe differences, as current methods require significant time to organize and analyze recipe data, making it difficult to identify trends and overcome failures efficiently.
Innovation Solution
A management apparatus and method that superimposes and displays lot data of different recipes on a single graph, allowing for instant trend analysis and facilitating quick identification of failure causes by comparing recipe trends.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If lot data of different recipes are displayed separately or in traditional formats, then data organization is straightforward, but trend analysis across recipes becomes time-consuming and difficult
Solution Approach 1:
The patent merges lot data from multiple different recipes into a single unified graph display. The graph superimposes data points from different recipes using different markers or colors, allowing operators to simultaneously view and compare trends across multiple recipes without switching between separate displays or manually organizing data.
Solution Approach 2:
The patent adds a categorical dimension to the graph by incorporating recipe identification markers alongside the traditional time-series or parameter-based dimensions. This allows the graph to encode multiple types of information (temporal trends, parameter variations, and recipe identification) in a single visual space, enabling rapid cross-recipe comparison.
2Measurement precision
If detailed recipe data is collected and analyzed manually, then comprehensive failure cause determination is possible, but the process takes significant time
Solution Approach 1:
The system provides immediate visual feedback by automatically plotting lot data from different recipes on a unified graph as data becomes available. The graph dynamically updates to show trends, deviations, and patterns across recipes, enabling operators to quickly identify potential failure causes without waiting for manual analysis completion.
Solution Approach 2:
The graph display system automatically performs the analysis function by visually highlighting trends, deviations, and patterns in the superimposed recipe data. The system self-organizes the data presentation to make failure causes apparent through visual inspection, reducing the need for manual data organization and analysis efforts.
Data Source
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AI summary
An information processing apparatus (300) includes an acquisition unit configured to acquire information containing first process data indicating a result of a substrate process in a first process condition (714, 724) and second process data indicating a result of a substrate process in a second process condition (715, 725) different from the first process condition (714, 724), and a display control unit configured to control a display on a display apparatus (306) based on the information acquired by the acquisition unit, wherein the display control unit is configured to display, on the display apparatus (306), a first screen (701, 711) displaying a first data group in which the first process data is arranged chronologically and a second data group in which the second process data is arranged chronologically, the first screen (701, 711) displaying the first data group in a region and the second data group in another region.