Recipe Verification via Log Comparison in Substrate Processing
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Solution Overview
Problem
In semiconductor manufacturing, the vast number of process recipe combinations in photolithography makes it difficult to verify the operation of the recipe execution program, leading to potential hardware malfunctions and lengthy debugging processes due to the complexity of interactions between program modules.
Innovation Solution
A substrate processing system that includes a computer-controlled substrate processing apparatus, storage for process recipe data, a recipe execution program, a log output program to record instructions, and a comparing and checking program to detect discrepancies between log data and process recipe data, allowing for rapid identification and correction of bugs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the number of process recipe combinations is increased to cover more manufacturing scenarios, then the versatility of the system is improved, but the difficulty of verifying the recipe execution program increases
Solution Approach 1:
The patent creates a virtual model (log data) that copies the actual execution instructions from the recipe execution program. This log data serves as a reproducible representation of program behavior that can be verified independently from the actual hardware execution, allowing comprehensive verification without increasing system complexity
Solution Approach 2:
The patent introduces a comparing and checking program as an intermediary layer between the recipe execution program and the verification process. This intermediary automatically compares log data against expected process recipe requirements, eliminating the need for manual verification of complex recipe combinations
2Reliability
If manual debugging is performed to detect program bugs, then the reliability of the system is improved, but the time required for debugging increases
Solution Approach 1:
The patent implements an automated feedback mechanism where the comparing and checking program continuously monitors log data against process recipe requirements and automatically identifies discrepancies. This feedback loop rapidly detects bugs without manual intervention, simultaneously improving reliability and reducing debugging time
Solution Approach 2:
The verification system performs self-verification by automatically comparing its own execution logs against expected outcomes. The system detects its own bugs through automated comparison without requiring external manual debugging, enabling rapid identification and correction of program errors
3Productivity
If the recipe execution program is used before full verification, then the productivity of the system is improved, but the risk of hardware malfunction increases
Solution Approach 1:
The patent implements partial verification by comparing critical portions of log data against process recipe requirements rather than requiring complete exhaustive verification of all possible scenarios. This allows the system to be deployed with reasonable confidence while maintaining productivity, accepting that not every edge case is verified
Solution Approach 2:
The patent performs preliminary verification checks on the recipe execution program before full deployment by comparing initial log data against process recipes. This preliminary action identifies obvious bugs early, allowing the system to be used productively while continuing to improve reliability through ongoing verification
Data Source
AI summary
Disclosed is a method of verifying a recipe execution program. When a computer executes a recipe execution program, the computer sends instructions, which are issued based on a process recipe data defining specific operations to be performed by a substrate processing apparatus, to the substrate processing apparatus. When a computer executes a log output program, the computer outputs a log data indicating the instructions sent to the substrate processing apparatus. When a computer executes a comparing and checking program, the computer compares the log data which the process recipe data corresponding to the log data.