Reciprocable Precision Stage for Continuous Substrate Coating

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Solution Overview

Problem

Conventional substrate coating devices are unable to move substrates in the conveying direction during coating, leading to prolonged takt times due to the nozzle's perpendicular movement relative to the substrate conveying direction, which necessitates substrate stopping and increased processing time.

Innovation Solution

A substrate coating device equipped with a reciprocable stage, conveyor, and control system that allows the substrate to move along a conveying path while being coated, enabling continuous substrate movement by coordinating the stage and conveyor operations to maintain optimal nozzle positioning and coating liquid delivery.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the nozzle moves perpendicular to the substrate conveying direction relative to a stopped substrate, then the spacing between the nozzle and substrate can be kept constant for uniform coating, but the substrate must stop during coating which prolongs the takt time

Engineering Contradiction:
Improvecoating uniformityVSAvoidtakt time
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The invention transitions from a static coating system (where the substrate stops and the nozzle moves perpendicular to convey direction) to a dynamic system where both the substrate and nozzle move in the conveying direction. The nozzle is mounted on a movable platform that travels along rails parallel to the substrate conveyance, enabling synchronized movement and eliminating the need for substrate stopping while maintaining constant nozzle-substrate spacing through coordinated control.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The invention enables continuous substrate conveyance during the coating process by moving the nozzle in the same direction as substrate transport. The coating operation occurs continuously as the substrate passes through the coating zone, eliminating idle stopping time and achieving uninterrupted productive action throughout the coating cycle.

Inventive Principle:
Principle #20Continuity of useful action

2Manufacturing precision

If the substrate stops during coating operation, then the nozzle can deliver coating liquid uniformly across the substrate surface, but the coating operation time is prolonged

Engineering Contradiction:
Improvecoating thickness uniformityVSAvoidcoating operation time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The system employs dynamic coordination where the nozzle platform moves at the same speed as substrate conveyance. This synchronized movement allows the nozzle to maintain a constant relative position to the substrate surface while both move forward, enabling uniform coating application without requiring substrate stopping and thereby reducing total coating operation time.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The coating process occurs continuously during substrate conveyance rather than during stationary periods. The nozzle delivers coating liquid uniformly across the moving substrate surface through coordinated motion control, eliminating idle time and achieving continuous productive operation.

Inventive Principle:
Principle #20Continuity of useful action

3Manufacturing precision

If a precision stage with a smooth top surface is used to keep the nozzle-substrate spacing constant, then uniform coating is achieved, but the substrate must be placed and removed manually which reduces productivity

Engineering Contradiction:
Improvenozzle-substrate spacing controlVSAvoidsubstrate handling efficiency
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The invention replaces the static precision stage with a dynamic movable platform that travels with the substrate. The nozzle platform moves synchronously with substrate conveyance along parallel rails, maintaining constant spacing through coordinated motion rather than relying on a stationary precision stage. This eliminates manual placement and removal operations, enabling continuous automated handling and significantly improving productivity.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The movable nozzle platform system enables continuous substrate conveyance and coating operation without manual intervention for loading and unloading. The synchronized movement mechanism maintains precise nozzle-substrate spacing throughout the continuous process, eliminating idle time associated with manual stage operations.

Inventive Principle:
Principle #20Continuity of useful action

Data Source

PatentUS9067234B2Substrate coating device and substrate coating method
Publication Date: 2015.06.30 TATSUMO KK
  • US9067234B2 patent drawing
  • US9067234B2 patent drawing
  • US9067234B2 patent drawing

AI summary

A substrate coating device (10) includes a precision stage (7), a nozzle (8), and conveyors (3 to 6 and 21). The precision stage (7) has a horizontal placement surface for placing a substrate W thereon and is configured to be reciprocable between an upstream end and a downstream end in a conveying direction. The conveyors (3 to 6 and 21) are configured to convey the substrate W in the conveying direction via the placement surface of the precision stage (7) in such manner that a surface of the substrate W is positioned in a horizontal plane. The intermediate conveyor (21) is liftable between a conveying position where a conveying surface of the intermediate conveyor is coincident with the placement surface of the stage and a non-conveying position where the conveying surface is positioned below the placement surface of the stage.