Reciprocating Nozzle Module for Semiconductor Substrate Processing

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Solution Overview

Problem

In semiconductor substrate processing, the existing nozzle systems consume excessive chemical liquids and result in production losses due to unnecessary movement of all nozzles during cleaning, including those not required for the task.

Innovation Solution

A nozzle module and substrate processing apparatus design featuring a base portion with a reciprocating nozzle unit and a vessel unit that can independently move, allowing only necessary nozzles to be raised and lowered, with a support unit guiding the nozzle module to prevent interference and optimize liquid usage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If all nozzles move to the home pot together during cleaning, then cleaning can be performed, but production loss increases and chemical consumption increases

Engineering Contradiction:

Improvecleaning effectivenessVSAvoidproduction loss

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The nozzle assembly is divided into multiple independently movable nozzles. Each nozzle can be selectively moved to the home pot for cleaning based on its specific condition, rather than moving all nozzles together. This segmentation allows only the necessary nozzles to be cleaned, reducing production loss while maintaining cleaning effectiveness.

Inventive Principle:

Principle #1Segmentation

2Reliability

If all nozzles move to the home pot together during cleaning, then cleaning can be performed, but chemical liquid consumption increases

Engineering Contradiction:

Improvecleaning effectivenessVSAvoidchemical liquid consumption

Core Design Contradiction:

ReliabilityVSLoss of substance

Solution Approach 1:

The nozzle assembly is divided into multiple independently movable nozzles. Each nozzle can be selectively moved to the home pot for cleaning based on its specific condition, rather than moving all nozzles together. This segmentation reduces the total volume of chemical liquid required for cleaning by targeting only the necessary nozzles.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Instead of cleaning all nozzles (excessive action), the system performs partial cleaning by moving only the nozzles that actually require cleaning to the home pot. This partial action reduces chemical liquid consumption while maintaining adequate cleaning effectiveness.

Inventive Principle:

Principle #16Partial or excessive action

3Device complexity

If nozzles are integratedly moved as the nozzle arm moves, then structure is simplified, but unnecessary movement occurs causing production loss

Engineering Contradiction:

Improvenozzle movement mechanismVSAvoidproduction loss

Core Design Contradiction:

Device complexityVSProductivity

Solution Approach 1:

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The system transitions from a static integrated nozzle structure to a dynamic configuration where nozzles can independently change their position. This dynamic capability allows nozzles to be selectively moved to the home pot only when needed, reducing unnecessary movement and production loss.

Inventive Principle:

Principle #15Dynamics

Data Source

PatentUS20250091062A1Nozzle module and substrate processing apparatus including the same

Publication Date: 2025.03.20 SYSTEM ENGINEERING MEGA SOLUTION CO LTD

AI summary

A nozzle module includes a base portion; a nozzle portion disposed on the base portion, and including a first body, and a nozzle portion reciprocating in a first movement direction; and a vessel unit disposed to face the nozzle portion, and including a second body reciprocating in a second movement direction, and an accommodation portion concavely formed inwardly from an upper surface of the second body.