Reconfigurable MEMS Electrodes for Multi-Frequency Resonance
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Solution Overview
Problem
Acoustic devices, such as ultrasonic transducer devices, are non-programmable and cannot be tuned after fabrication, requiring multiple devices for different operating frequencies, leading to increased module size and complexity.
Innovation Solution
A MEMS device with reconfigurable electrode segments and a reconfiguration switch that allows for reconfiguration of electrical connections, enabling the generation of different resonant frequencies by changing the electrode pitch or separation distance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple acoustic devices are employed to deliver multiple functions at different operating frequencies, then the functional versatility is improved, but the module footprint and device complexity increase
Solution Approach 1:
The patent implements a single acoustic device that can perform multiple functions at different operating frequencies by incorporating reconfigurable electrode segments. These segments can be selectively connected or disconnected to change the effective electrode pitch, allowing the same device to operate as different types of acoustic components (e.g., reflectors, gratings, resonators) at different frequencies, thereby eliminating the need for multiple separate devices
Solution Approach 2:
The patent introduces reconfigurable electrode segments with switching elements that allow dynamic reconfiguration of the electrode structure after fabrication. By changing the electrical connections of these segments, the device can adapt its resonant frequency and functional characteristics in real-time, transforming a static single-frequency device into a dynamic multi-frequency system
2Adaptability or versatility
If multiple acoustic devices are employed to deliver multiple functions, then the functional versatility is improved, but the device complexity increases
Solution Approach 1:
The patent implements a single acoustic device that can perform multiple functions at different operating frequencies by incorporating reconfigurable electrode segments. These segments can be selectively connected or disconnected to change the effective electrode pitch, allowing the same device to operate as different types of acoustic components (e.g., reflectors, gratings, resonators) at different frequencies, thereby eliminating the need for multiple separate devices
Solution Approach 2:
The patent divides the electrode structure into fixed electrode segments and reconfigurable electrode segments. This segmentation allows independent control of different portions of the electrode, enabling the device to be reconfigured for different functions by changing the state of specific segments without affecting the overall device structure
3Ease of manufacture
If acoustic devices are hardwired after fabrication, then the manufacturing simplicity is improved, but the adaptability after fabrication deteriorates
Solution Approach 1:
The patent introduces reconfigurable electrode segments with switching elements that allow dynamic reconfiguration of the electrode structure after fabrication. By changing the electrical connections of these segments, the device can adapt its resonant frequency and functional characteristics in real-time, transforming a static single-frequency device into a dynamic multi-frequency system
Solution Approach 2:
The patent incorporates reconfigurable electrode segments and switching elements during the initial fabrication process, preparing the device for future reconfiguration. This preliminary integration of reconfigurability features allows the device to be manufactured using standard processes while retaining the capability for post-fabrication tuning and adaptation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the reduction of device footprint for multi-frequency applications and allows for arbitrary coupling of operating frequencies, improving the versatility and efficiency of acoustic devices.
Implementation Method 1
an active layer... A first electrode and a second electrode is arranged over the first surface of the active layer
Implementation Method 2
The MEMS device is configured to generate different resonant frequencies by reconfiguring the electrical connections to the at least one reconfigurable electrode segment
Data Source
AI summary
A MEMS device including an active layer having a first surface and a second surface is provided. A first electrode and a second electrode, and at least one reconfigurable electrode segment are arranged over the first surface of the active layer. At least one reconfiguration layer is arranged over the second surface of the active layer. The at least one reconfigurable electrode segment and the at least one reconfiguration layer overlaps. One or more via contacts are disposed through the active layer configured to couple the at least one reconfigurable electrode segment and the at least one reconfiguration layer. The at least one reconfiguration layer is coupled to a reconfiguration switch for reconfiguring electrical connections to the at least one reconfigurable electrode segment. The MEMS device is configured to generate different resonant frequencies by reconfiguring the electrical connections to the at least one reconfigurable electrode segment using the reconfiguration switch.