Record Matching Rules for Automated Maintenance Scheduling

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Solution Overview

Problem

The challenge in the lithographic process is the difficulty in integrating and qualifying data from various data sources with differing data quality, accuracy, and scope, which hinders effective maintenance scheduling and record matching in manufacturing systems, leading to labor-intensive and time-consuming processes.

Innovation Solution

A method that repeatedly matches and filters records from multiple data sources using successively less strict matching rules, defined based on the variation in data quality, to integrate and qualify data, enabling automated scheduling of maintenance actions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If strict matching rules are used to ensure high data quality, then data accuracy is improved, but the quantity of matched records decreases and more manual intervention is required

Engineering Contradiction:
Improvedata accuracyVSAvoidrecord matching efficiency
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The system dynamically adjusts matching rule strictness based on data source reliability assessments. High-quality data sources undergo stricter validation, while lower-quality sources receive more lenient matching, allowing the system to optimize between accuracy and throughput adaptively

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

Different matching strictness levels are applied to different data sources or data fields based on their inherent quality characteristics. Critical fields with high-stakes consequences use strict matching, while less critical fields use more lenient rules, achieving local optimization of the matching process

Inventive Principle:
Principle #3Local quality

2Loss of information

If multiple data sources are integrated to provide comprehensive maintenance information, then data completeness is improved, but the complexity of data integration and qualification increases

Engineering Contradiction:
Improvedata completenessVSAvoiddata integration complexity
Core Design Contradiction:
Loss of informationVSDevice complexity

Solution Approach 1:

A central data quality assessment module acts as an intermediary between multiple data sources and the maintenance scheduling system. This mediator evaluates data quality, assigns reliability scores, and standardizes data formats, simplifying the integration of heterogeneous data sources while maintaining comprehensive information

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The system transforms raw data from multiple sources into standardized parameters with associated quality metrics. By changing the representation of data into a unified parameter format with reliability indicators, the system manages integration complexity while preserving comprehensive information from diverse sources

Inventive Principle:
Principle #35Parameter changes

3Productivity

If automated matching processes are implemented to reduce manual labor, then productivity is improved, but the ability to handle variation in data quality across sources deteriorates

Engineering Contradiction:
Improvemaintenance scheduling efficiencyVSAvoiddata quality variation handling
Core Design Contradiction:
ProductivityVSAdaptability or versatility

Solution Approach 1:

The automated matching system incorporates feedback loops where matching results and data quality assessments are continuously evaluated. The system learns from mismatches and quality issues, adjusting matching rules and data source reliability scores over time, enabling it to handle data quality variation adaptively while maintaining high automation levels

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The matching system dynamically adapts its rules based on observed data quality patterns. When variation in data quality is detected across sources, the system automatically adjusts matching strictness and selection criteria, maintaining productivity while becoming more versatile in handling different data quality scenarios

Inventive Principle:
Principle #15Dynamics

Data Source

PatentUS11204901B2Method of matching records, method of scheduling maintenance and apparatus
Publication Date: 2021.12.21 ASML NETHERLANDS BV
  • US11204901B2 patent drawing
  • US11204901B2 patent drawing
  • US11204901B2 patent drawing

AI summary

A method of matching records from a plurality of data sources having variation between them in matching quality of their data, the method including repeatedly matching and filtering records from the data sources to obtain matched records using successively less strict matching rules, the matching rules being defined based on the variation in the matching quality.