Concentric Recovery Vessel Lifting for Compact Substrate Processing
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in miniaturization due to limitations in the configuration for adjusting the height of recovery vessels, which can lead to uneven lifting and increased device size, and are not suitable for miniaturized equipment.
Innovation Solution
A moving assembly for a recovery guard featuring a lifting driver with dual motors and shafts connected to concentric recovery vessels, allowing precise control and stable movement of multiple recovery vessels, reducing the overall size of the apparatus.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a cylinder and motor combination is used to adjust the height of the recovery vessel, then the lifting and lowering function is achieved, but the device height increases and lifting uniformity is not ensured
Solution Approach 1:
The patent combines the motor and cylinder into an integrated lifting driver assembly, where the motor directly drives the lifting mechanism through a lifting rod. This merging eliminates the need for separate cylinder and motor components, reducing the overall device height while maintaining the lifting function.
Solution Approach 2:
The lifting driver is designed as a multi-functional component that simultaneously provides lifting force, positional control, and uniform motion distribution to multiple recovery vessels through its mechanical structure, eliminating the need for separate actuation systems for each vessel.
2Reliability
If individual recovery vessels are matched to individual processing containers, then the recovery function is optimized, but the device size increases and miniaturization is limited
Solution Approach 1:
Multiple recovery vessels are combined under a single lifting driver assembly, with the first and second recovery vessels both connected to the same lifting mechanism. This merging reduces the number of independent actuation systems needed, thereby reducing device size while maintaining individual recovery capabilities for each vessel.
Solution Approach 2:
The patent employs a nested arrangement where the second recovery vessel is positioned inside or adjacent to the first recovery vessel, both sharing a common lifting driver. This nested configuration optimizes space utilization and enables miniaturization while maintaining the function of individual vessel recovery.
3Volume of stationary object
If the recovery vessel height adjustment configuration is simplified for miniaturization, then device size is reduced, but lifting uniformity cannot be ensured
Solution Approach 1:
The lifting driver incorporates an asymmetric mechanical structure with a lifting rod positioned at a specific distance from the rotation axis, creating differential lever arms that naturally compensate for positional variations. This asymmetric design ensures uniform lifting motion across multiple recovery vessels even with a compact configuration.
Solution Approach 2:
The patent adjusts the physical parameters of the lifting mechanism, specifically the distance between the lifting rod and rotation axis, to optimize the lifting uniformity. By carefully selecting this parameter, the system achieves stable and uniform lifting motion while maintaining a minimized device size suitable for miniaturization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables stable and efficient operation of recovery vessels in a compact substrate processing apparatus, ensuring uniform lifting and lowering, and accommodating varying rotational speeds without increasing the device's footprint.
Implementation Method 1
a first motor and a second motor, a first shaft connected to the first motor and the first recovery vessel and moving in a first direction by driving the first motor
Implementation Method 2
a first motor and a second motor, a first shaft connected to the first motor and the first recovery vessel and moving in a first direction by driving the first motor, a second shaft connected to the second motor and the second recovery vessel and moving in the first direction by driving the second motor
Implementation Method 3
a lifting driver connected to the first and second recovery vessels and elevating the first and second recovery vessels
Data Source
AI summary
The moving assembly for a recovery guard includes a recovery vessel, including a first recovery vessel surrounding a substrate support, a second recovery vessel, and a lifting driver connected to the first and second recovery vessels and elevating the first and second recovery vessels. The lifting driver includes a first motor and a second motor, a first shaft connected to the first motor and the first recovery vessel and moving in a first direction by driving the first motor, a second shaft connected to the second motor and the second recovery vessel and moving in the first direction by driving the second motor, a first connecting portion connecting the first shaft and the first recovery vessel, and a second connecting portion connecting the second shaft and the second recovery vessel, the second connecting portion including a passage hole through which the first shaft passes.