Rectangular Waveguide Injecting Unit for Compact Plasma Generation

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Solution Overview

Problem

Existing microwave guiding apparatuses for plasma generation are complex and bulky, requiring additional components like tapers for efficient microwave transmission, which increases size and complexity.

Innovation Solution

A compact apparatus with a waveguide having a rectangular cross-section and a width-to-height ratio greater than 3, where the antenna surrounding walls enclose the microwave source and guide the microwave into a waveguide with reduced height, eliminating the need for taper regions and allowing direct coupling to a plasma generation region.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional waveguide structures with standard aspect ratios are used, then reliable microwave transmission is achieved, but the apparatus size and complexity increase due to required taper regions and additional components

Engineering Contradiction:
Improvemicrowave transmission efficiencyVSAvoidapparatus size
Core Design Contradiction:
ReliabilityVSVolume of stationary object

Solution Approach 1:

The patent changes the geometric parameters of the waveguide, specifically using a width-to-height ratio greater than 3 (a/b > 3), which is significantly higher than conventional waveguides. This parameter change allows the waveguide to efficiently transmit microwaves from the antenna while maintaining a compact size, eliminating the need for additional taper regions that would otherwise be required to match impedance between standard waveguides and plasma generation regions.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If additional components like tapers are added to ensure efficient microwave transmission, then transmission reliability improves, but device complexity increases

Engineering Contradiction:
Improvemicrowave transmission efficiencyVSAvoidapparatus structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges the waveguide structure directly with the plasma generation region by using an oversized width-to-height ratio. This integration eliminates the need for separate taper components that would otherwise be required to transition between different waveguide modes and dimensions. The waveguide boundary walls extend directly to form the plasma generation chamber, combining multiple functions into a single integrated structure.

Inventive Principle:
Principle #5Merging (Combining)

3Ease of manufacture

If standard waveguide dimensions are used, then conventional design practices are followed, but the apparatus requires more space and additional components for proper microwave coupling

Engineering Contradiction:
Improvedesign standardizationVSAvoidapparatus length
Core Design Contradiction:
Ease of manufactureVSLength of stationary object

Solution Approach 1:

The patent emphasizes the width dimension of the waveguide rather than following conventional proportions. By making the width significantly larger than the height (a/b > 3), the design exploits the width dimension to achieve efficient microwave transmission and direct coupling to the plasma region, thereby reducing the overall apparatus length and eliminating the need for additional coupling components along the propagation direction.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution simplifies the construction and reduces the size of the apparatus while maintaining efficient microwave transmission, enabling effective plasma generation for spectroscopic analysis and other applications without the need for additional bulky components.

Implementation Method 1

waveguide boundary walls, at least two of which are arranged in parallel to each other, wherein the waveguide boundary walls form a, in particular cuboid-shaped, waveguide

Methodology Applied
Scientific EffectWaveguide: Waveguide

Implementation Method 2

designed to induce a plasma by the microwave guided in the waveguide

Methodology Applied
Scientific EffectPlasma generation through ionization: Ionisation

Data Source

PatentUS11602040B2Waveguide injecting unit
Publication Date: 2023.03.07 ANTON PAAR GMBH
  • US11602040B2 patent drawing
  • US11602040B2 patent drawing
  • US11602040B2 patent drawing

AI summary

Described is an apparatus for guiding an electromagnetic microwave, having: antenna surrounding walls, which define an interior space so as to surround therein at least an end region of an antenna of a microwave source, in particular laterally annularly as well as frontally; waveguide boundary walls, at least two of which are arranged in parallel to each other, wherein the waveguide boundary walls form a, in particular cuboid-shaped, waveguide having a substantially rectangular cross-section, wherein a cross-sectional plane is defined by a first direction that extends along a longitudinal direction of the antenna and a second direction that extends perpendicularly to the first direction, wherein it holds: 25>a/b>3, wherein a: is a width of the waveguide along the second direction, b: is a height of the waveguide along the first direction, wherein the apparatus is designed to let proceed a microwave from the interior space of the antenna surrounding walls into the waveguide.