Rectifier Short Circuit Detection in Plating Apparatus
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Solution Overview
Problem
In a plating apparatus, short circuits between the rectifier and the substrate holder often go undetected until the substrate is immersed in the plating solution, leading to wastage of substrates as defective products.
Innovation Solution
A method where a current with a predetermined value is supplied from the rectifier to the substrate without electrical connection, and the output voltage is compared to a reference value to determine if a short circuit exists, allowing for detection before plating begins, thus preventing unnecessary substrate waste.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If short circuit detection is performed after substrate immersion in plating solution, then detection can be conducted using existing plating setup, but substrate is wasted as defective product
Solution Approach 1:
The invention performs short circuit detection before substrate immersion in plating solution by outputting a predetermined current from the rectifier in a state where substrate and substrate holder are not electrically connected to the rectifier. This preliminary detection action prevents substrate waste by identifying wiring short circuits before the plating process begins, resolving the contradiction between detection reliability and substrate loss.
2Loss of substance
If predetermined current is outputted before substrate electrical connection, then short circuit can be detected without substrate waste, but detection timing must be controlled precisely
Solution Approach 1:
The invention uses feedback control by comparing the output voltage value of the rectifier with a predetermined reference voltage value. When the output voltage is lower than the reference voltage, a short circuit is detected. This feedback mechanism automates the detection process, reducing control complexity while enabling timely detection before substrate immersion, thus preventing substrate waste.
3Object-affected harmful factors
If output current value is kept small during detection, then safety is improved and substrate damage is prevented, but detection sensitivity may be reduced
Solution Approach 1:
The invention changes the parameter of current value by outputting a predetermined current value that is smaller than the current during plating processing. This parameter adjustment ensures safety and prevents substrate damage during detection. The system compensates for the lower current by using voltage comparison with reference voltage to maintain detection sensitivity, resolving the contradiction between safety and detection precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the detection of short circuits without immersing the substrate, preventing wastage and ensuring only non-defective substrates undergo plating processing.
Implementation Method 1
a step of outputting a current with a predetermined current value from the rectifier, in a state where the substrate and a substrate holder holding the substrate are not electrically connected to the rectifier, a step of acquiring an output voltage value of the rectifier, a step of comparing the output voltage value with a predetermined reference voltage value, and a step of determining that a short circuit occurs in a circuit for connecting the rectifier and the substrate
Data Source
AI summary
In a plating apparatus, a short circuit of a wiring between a rectifier and a plating device is detected without using a substrate in vain. In the plating apparatus that supplies a current from the rectifier to the substrate to plate the substrate, a short circuit detection method includes a step of outputting a current with a predetermined current value from the rectifier, in a state where the substrate and a substrate holder holding the substrate are not electrically connected to the rectifier, a step of acquiring an output voltage value of the rectifier, a step of comparing the output voltage value with a predetermined reference voltage value, and a step of determining that a short circuit occurs in a circuit for connecting the rectifier and the substrate, in a case where the output voltage value is lower than the reference voltage value.