Recursive Gas Channel Showerhead for Uniform Flow and Low Thickness
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Solution Overview
Problem
Conventional showerhead assemblies in semiconductor process chambers face issues such as leaking and increased thickness due to the use of weldments to split a single gas inlet into multiple outlets, affecting serviceability and flow distribution.
Innovation Solution
A showerhead assembly with a chill plate featuring recursive gas paths and cooling channels, coupled with a heater plate containing heating elements and independent gas distribution holes, to provide uniform gas flow and minimize thickness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If weldments are used to split the single gas inlet into multiple gas outlets, then gas distribution is achieved, but leaking and serviceability issues occur
Solution Approach 1:
The gas distribution system is segmented into multiple independent recursive gas paths within the chill plate, each path providing separate fluid communication from the gas inlet to multiple gas outlets. This segmentation eliminates the need for weldments while achieving effective gas distribution across the substrate surface.
Solution Approach 2:
The chill plate serves multiple functions simultaneously: it provides gas distribution through recursive gas paths, thermal management through cooling channels, and structural support. This multi-functionality eliminates the need for separate weldment assemblies, improving reliability while maintaining gas distribution capability.
2Ease of manufacture
If weldments are used to split the single gas inlet into the plurality of gas outlets, then gas distribution is achieved, but the overall thickness of the showerhead assembly increases
Solution Approach 1:
The recursive gas paths are nested within the chill plate structure, utilizing the plate's thickness efficiently. The gas paths follow a recursive pattern that branches within the available space, distributing gas to multiple outlets without requiring additional thickness beyond the chill plate itself.
Solution Approach 2:
The gas distribution is achieved by utilizing the planar dimension of the chill plate rather than adding thickness. The recursive gas paths extend radially across the plate surface in a two-dimensional pattern, providing multiple gas outlets without increasing the overall thickness of the showerhead assembly.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures uniform gas distribution and reduces assembly thickness, enhancing the reliability and efficiency of substrate processing.
Implementation Method 1
one or more cooling channels disposed therein
Implementation Method 2
cooling channels disposed therein
Implementation Method 3
one or more heating elements disposed therein
Data Source
AI summary
Embodiments of showerheads are provided herein. In some embodiments, a showerhead assembly includes a chill plate having a plurality of recursive gas paths and one or more cooling channels disposed therein, wherein each of the plurality of recursive gas paths is fluidly coupled to a single gas inlet extending to a first side of the chill plate and a plurality of gas outlets extending to a second side of the chill plate; and a heater plate coupled to the chill plate, wherein the heater plate includes a plurality of first gas distribution holes extending from a top surface thereof to a plurality of plenums disposed within the heater plate, the plurality of first gas distribution holes corresponding with the plurality of gas outlets of the chill plate, and a plurality of second gas distribution holes extending from the plurality of plenums to a lower surface of the heater plate.