Redistribution Layer Layout for Semiconductor Latch-Up Protection

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Solution Overview

Problem

The increasing integration and packaging density of semiconductor devices leads to a higher likelihood of latch-up events, which can cause irreparable damage due to large current surges from parasitic silicon controlled rectifiers, necessitating improved layout designs or process technologies to enhance reliability.

Innovation Solution

Incorporating a latch-up protection circuit separated from the chip and connected via redistribution layers to prevent latch-up by diverting instantaneous current away from critical components.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If the latch-up protection circuit is integrated with the chip, then device complexity is reduced, but reliability deteriorates due to increased latch-up risk

Engineering Contradiction:
Improvedevice complexityVSAvoidreliability
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent divides the semiconductor device into separate functional modules: the main chip and the latch-up protection circuit are fabricated on different substrates. This segmentation isolates the protection circuit from the main chip, reducing the risk of latch-up while maintaining device functionality. The redistribution layer serves as the interconnection medium between these segmented parts.

Inventive Principle:
Principle #1Segmentation

2Reliability

If the latch-up protection circuit is separated from the chip, then reliability is improved, but device complexity increases

Engineering Contradiction:
ImprovereliabilityVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The redistribution layer acts as an intermediary component that connects the latch-up protection circuit on the first substrate to the chip on the second substrate. This mediator enables signal transmission between separated functional blocks while maintaining a modular architecture that improves reliability without excessive complexity.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Manufacturing precision

If the same manufacturing process is used for both chip and protection circuit, then manufacturing precision is maintained, but manufacturing cost increases

Engineering Contradiction:
Improvemanufacturing precisionVSAvoidmanufacturing cost
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent applies different manufacturing process nodes to different functional blocks: the chip can be fabricated using an advanced process node for high performance, while the latch-up protection circuit uses a less advanced but more cost-effective process node. This local quality approach optimizes the cost-performance ratio by matching process complexity to functional requirements.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS12610866B2Semiconductor device and method of manufacturing the same
Publication Date: 2026.04.21 NAT YANG MING CHIAO TUNG UNIV
  • US12610866B2 patent drawing
  • US12610866B2 patent drawing
  • US12610866B2 patent drawing

AI summary

An embodiment of the present application provides a semiconductor device, including a substrate, a chip, a latch-up protection circuit, and a redistribution layer. The chip is on the substrate. The latch-up protection circuit is separated from the chip in a direction. The redistribution layer transmits a signal between the latch-up protection circuit and the chip.