Redistribution Layer Through Openings Prevent Delamination
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Solution Overview
Problem
Conventional chip structures with redistribution layers experience delamination issues due to poor bonding between metal widened portions and non-metal passivation layers, leading to reduced electrical connection quality.
Innovation Solution
A chip structure with a redistribution layer comprising a seed layer and a metal layer, where the redistribution layer includes conductive traces with through openings that expose the passivation layer, and a second passivation layer is formed to fill these openings, ensuring strong bonding between the passivation layers and preventing delamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a redistribution layer with widened portions is formed to improve electrical performance, then electrical connection quality is improved, but bonding between the metal widened portions and non-metal passivation layer deteriorates, causing delamination
Solution Approach 1:
The patent applies local quality by forming through openings at specific locations within the conductive trace (widened portion) to expose the underlying first passivation layer. This localized modification allows the second passivation layer to bond directly to the first passivation layer at these through opening sites, creating strong bonding points precisely where needed to prevent delamination, while maintaining the overall widened structure for electrical performance.
Solution Approach 2:
The first passivation layer acts as an intermediary between the metal redistribution layer and the second passivation layer. By forming through openings that expose the first passivation layer, the patent creates an intermediate bonding interface that mediates the connection between the metal and non-metal layers, enabling reliable bonding without direct metal-to-passivation contact that would cause delamination.
2Reliability
If the bonding between widened portions and second passivation layer is improved, then delamination is prevented, but the manufacturing process becomes more complex
Solution Approach 1:
The patent applies preliminary action by forming the through openings in the conductive trace during the same fabrication step where the second passivation layer is deposited. The openings are pre-formed to expose the first passivation layer before the second passivation layer is applied, ensuring that bonding occurs automatically during the standard passivation layer formation process without requiring additional complex manufacturing steps.
Solution Approach 2:
The patent merges the through opening formation with the existing conductive trace fabrication process. The through openings are created as part of the same photolithography and etching sequence used to define the conductive trace pattern, combining multiple functions into a single integrated process step rather than adding separate complex manufacturing operations.
Data Source
AI summary
A chip structure having a redistribution layer includes: a chip with electrode pads disposed on an active surface thereof; a first passivation layer formed on the active surface and the electrode pads; a redistribution layer formed on the first passivation layer and having a plurality of wiring units, wherein each of the wiring units has a conductive pad, a conductive via and a conductive trace connecting the conductive pad and the conductive via, the conductive trace having at least a first through opening for exposing a portion of the first passivation layer; and a second passivation layer disposed on the first passivation layer and the redistribution layer, the second passivation layer being filled in the first through opening such that the first and second passivation layers are bonded to each other with the conductive trace sandwiched therebetween, thereby preventing delamination of the conductive trace from the second passivation layer.


