Redistribution Structure Internal Supports for Package Warpage Control

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

The semiconductor industry faces challenges in minimizing stress and warping in package structures due to the integration of multiple interconnects and integrated circuit dies, which can lead to performance issues and reduced yield.

Innovation Solution

Incorporating internal supports within the redistribution structure, such as dummy dies or bulk materials, to provide structural stability and reduce stress, particularly by laterally overlapping with interconnect regions and integrated circuit dies, thereby enhancing the package's mechanical integrity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple interconnects and integrated circuit dies are integrated into the package structure, then the functionality and component density are improved, but stress and warping increase

Engineering Contradiction:
ImprovefunctionalityVSAvoidstress and warping
Core Design Contradiction:
Adaptability or versatilityVSStability of the object's composition

Solution Approach 1:

The patent introduces an intermediary material layer between the integrated circuit dies and the package substrate to act as a stress buffer. This intermediate layer absorbs and distributes the thermal and mechanical stress generated by multiple interconnects and dies, preventing warping while maintaining the high functionality of the package structure.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent employs composite material structures combining different materials with complementary properties. The package structure integrates rigid support materials with flexible stress-absorbing materials, creating a composite system that provides both structural stability and stress relief for high-density component integration.

Inventive Principle:
Principle #40Composite materials

2Quantity of substance

If multiple interconnects and integrated circuit dies are integrated into the package structure, then the component density is improved, but warping and cracking increase

Engineering Contradiction:
Improvecomponent densityVSAvoidwarping and cracking
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent applies beforehand cushioning by pre-positioning stress-absorbing material layers and support structures during the packaging process. These cushioning elements are strategically placed before final assembly to prevent warping and cracking from developing during subsequent thermal cycling and operational stress, thereby maintaining high component density without compromising reliability.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Solution Approach 2:

The patent utilizes parameter changes in material properties, particularly transitioning materials between different thermal and mechanical states during processing. By controlling temperature, pressure, and material phase changes during assembly, the patent optimizes stress distribution to enable high component density while preventing warping and cracking.

Inventive Principle:
Principle #35Parameter changes

3Stability of the object's composition

If internal supports are added to the redistribution structure, then stress reduction is improved, but device complexity increases

Engineering Contradiction:
Improvestress reductionVSAvoidstructure complexity
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The patent applies local quality by placing internal supports only in specific high-stress regions of the redistribution structure rather than uniformly throughout. This targeted approach provides effective stress reduction at critical locations while minimizing the overall addition of structural complexity to the device.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS11894318B2Semiconductor device and method of manufacture
Publication Date: 2024.02.06 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11894318B2 patent drawing
  • US11894318B2 patent drawing
  • US11894318B2 patent drawing

AI summary

A device includes a redistribution structure, including conductive features; dielectric layers; and an internal support within a first dielectric layer of the dielectric layers, wherein the internal support is free of passive and active devices; a first interconnect structure attached to a first side of the redistribution structure; a second interconnect structure attached to the first side of the redistribution structure, wherein the second interconnect structure is laterally adjacent the first interconnect structure, wherein the internal support laterally overlaps both the first interconnect structure and the second interconnect structure.