Redundant Hall Sensor Arrangement for Moisture-Resistant Magnetic Field Measurement
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Solution Overview
Problem
Magnetic field sensors in safety-relevant applications, such as automobiles, require high reliability, redundancy, and resistance to moisture, while being cost-effective and compact, as existing solutions often use moisture-sensitive passivation layers and larger housings that increase mechanical loads and reduce reliability.
Innovation Solution
A Hall sensor arrangement with two Hall sensors on separate semiconductor substrates, one on top and one on the underside of a carrier, with overlapping measuring areas to achieve redundant and moisture-insensitive measurements, eliminating the need for additional passivation layers and mounting aids, and allowing for a compact and balanced housing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If magnetic field sensors are used in safety-relevant applications with redundant systems, then reliability is improved, but device complexity and cost increase
Solution Approach 1:
Two Hall sensors are integrated into a single semiconductor component with a common carrier substrate, merging what would traditionally be separate components into one unified device. This reduces system complexity while maintaining the redundant measurement capability required for safety-relevant applications
Solution Approach 2:
The semiconductor component serves multiple functions: it provides redundant magnetic field measurement capability while also integrating electrical insulation and mechanical support functions within the single component structure, eliminating the need for separate housing and mounting elements
2Strength
If traditional housing structures are used for magnetic field sensors, then mechanical protection is provided, but the housing becomes larger and heavier, increasing mechanical loads
Solution Approach 1:
The patent extracts the housing function from the traditional sensor assembly and replaces it with the semiconductor carrier substrate itself, which provides mechanical support and protection without requiring an additional external housing structure
Solution Approach 2:
The carrier substrate serves multiple functions simultaneously: it provides mechanical support for the Hall sensors, electrical insulation between sensors, and structural integration for the redundant measurement system, eliminating the need for separate housing components
3Reliability
If moisture-sensitive passivation layers are used in semiconductor housings, then electrical insulation is provided, but the sensors become sensitive to moisture and have reduced lifetime
Solution Approach 1:
The patent removes the moisture-sensitive passivation layers from the semiconductor structure and replaces them with a moisture-insensitive ceramic coating, extracting the harmful element while maintaining the necessary electrical insulation function
Solution Approach 2:
The patent changes the material parameter of the protective layer from organic passivation material to inorganic ceramic coating, which fundamentally alters the moisture sensitivity characteristic from sensitive to resistant while maintaining electrical insulation properties
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a redundant, reliable, and cost-effective magnetic field measurement system that is insensitive to moisture, with improved mechanical and thermomechanical stability, and supports miniaturization of electronic components.
Implementation Method 1
Hall sensors are distinguished, in comparison with giant magnetoresistance (GMR) sensors, by the fact that Hall sensors measure the magnetic field component that is perpendicular to the Hall sensor
Data Source
AI summary
In various embodiments, a Hall sensor arrangement for the redundant measurement of a magnetic field may include a first Hall sensor on a top side of a first semiconductor substrate; a second Hall sensor on a top side of a second semiconductor substrate; a carrier having a top side and an underside; wherein the first Hall sensor is arranged on the top side of the carrier and the second Hall sensor is arranged on the underside of the carrier; and wherein the measuring area of the first Hall sensor projected perpendicularly onto the carrier at least partly overlaps the measuring area of the second Hall sensor projected perpendicularly onto the carrier.