Redundant Power Switching for Uninterrupted Semiconductor Processing
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Solution Overview
Problem
Conventional DC-powered semiconductor processing systems are prone to overheating, leading to power failures and inconsistencies, which disrupt production and result in substandard products due to the integration of DC power systems with processing components.
Innovation Solution
A power supply system with a redundant power supply unit and switching module that detects electrical states on the power line, providing backup power to ensure uninterrupted operation by coupling or decoupling the redundant power supply unit from the power line, and includes an enclosure configured as a heat sink to manage thermal issues.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If DC power systems are integrated with processing components to reduce device complexity, then device complexity is reduced, but reliability deteriorates due to overheating and power failures
Solution Approach 1:
The power supply system is divided into separate functional modules: a power supply unit, a heat sink unit, and a processing component unit. This segmentation allows each module to be optimized independently - the power supply can be designed for efficiency while the heat sink handles thermal management, resolving the contradiction between integration benefits and thermal management requirements.
Solution Approach 2:
A heat sink is introduced as an intermediary component between the power supply and the processing components. This heat sink acts as a thermal buffer that absorbs excess heat from the power supply before it reaches the processing components, thereby maintaining reliability without requiring complete separation of the power system.
2Reliability
If redundant power supply units are added to improve reliability, then reliability is improved, but device complexity increases
Solution Approach 1:
The system prepares backup power capacity in advance by designing the power supply unit with excess capacity that can immediately take over if the primary power source fails. This preliminary preparation of backup capability provides reliability without requiring complex redundant circuitry or switching mechanisms during operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system provides uninterrupted, in-spec power to semiconductor processing systems, minimizing the risk of power failures and overheating, allowing for continuous production without interruptions during power supply failures or replacements.
Implementation Method 1
includes an enclosure configured as a heat sink to manage thermal issues
Data Source
AI summary
The present disclosure provides a system and method for providing uninterrupted power to an external device. The system and method include a power supply module coupled to an AC power source and to an external device via a power line, a switching module coupled to the power line, a redundant power supply unit coupled to the AC power source and to the switching module. The switching module is configured to detect an electrical state of the power line and connect the redundant power supply unit to the power line for providing redundant power to the external device based upon the detected electrical state.