Redundantable Robot Assembly for Continuous Workpiece Transfer
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Solution Overview
Problem
Existing robot assemblies in semiconductor fabrication facilities are prone to failure, leading to disruptions in the continuous flow of workpieces and reduced throughput due to the lack of redundancy in critical components, which can cause equipment downtime and impact manufacturing productivity.
Innovation Solution
A redundantable robot assembly with independent robots and redundant components that can operate even when parts fail, allowing for seamless switching to operational parts and enabling in-situ servicing and calibration, ensuring continuous workpiece transport with minimal downtime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple independent robot arms are used to double throughput, then productivity increases, but device complexity increases
Solution Approach 1:
The robot assembly is divided into multiple independent robot arms (first robot arm, second robot arm), each capable of independent operation. This segmentation allows the system to maintain high productivity through parallel operations while managing complexity by making each segment modular and independently controllable.
Solution Approach 2:
The system dynamically changes operational parameters by switching between single-robot mode and dual-robot mode based on workload requirements. The controller can adjust the number of active robots, their speed parameters, and coordination modes to optimize productivity while adapting complexity to actual needs.
2Productivity
If faster robot movement is implemented to improve efficiency, then productivity increases, but reliability decreases
Solution Approach 1:
The system implements redundancy by providing a second robot arm as a backup and alternative operational path. When the first robot arm experiences failure or performance degradation, the system can switch to the second robot arm, cushioning the impact of failures and maintaining reliability while allowing the first robot to operate at higher speeds.
Solution Approach 2:
The second robot arm serves as a functional copy of the first robot arm, with similar capabilities and control systems. This copying approach allows the system to maintain reliability through redundancy while enabling faster operation of individual robots, as the copy can take over if the original fails.
3Reliability
If redundant components are added to improve reliability, then reliability increases, but device complexity increases
Solution Approach 1:
The second robot arm is designed with multi-functionality, serving both as a backup for reliability and as an active contributor to productivity during normal operations. This universal design allows the redundant component to participate in normal workload distribution, reducing the perceived complexity by making the redundant element productive rather than purely backup.
Solution Approach 2:
The controller automatically manages the switching between robot arms and the distribution of workloads without requiring external intervention. The system self-adjusts to maintain reliability by monitoring robot status and automatically engaging the second robot arm when needed, reducing operational complexity through automated self-management.
Data Source
AI summary
A redundantable robotic mechanism is disclosed for improving reliability of tranport equipment. The redundantable robot assembly typically comprises independent robots with separate controls, motors, linkage arms, or power, thus providing the capability of operation even if parts of the assembly are not operational or when parts of the assembly are removed for repair. The redundantable robot assembly can be also designed to allow in-situ servicing, e.g. servicing one robot when the other is running. The disclosed redundantable robot assembly provides virtual uninterrupted process flow, and thus greatly increases the yield for the manufacturing facility.