Reference Leak Crystal Plane Channels
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Solution Overview
Problem
Conventional reference leaks, such as platinum wire-glass, squeezed metal tube, and silica membrane helium leaks, have unpredictable and uncontrollable leak gaps due to random formation during manufacturing, leading to temperature sensitivity and increased calibration uncertainties in leak rate measurements.
Innovation Solution
A reference leak is manufactured using substrates with predetermined oblique walls formed by crystal planes, where scores are created and grooves are etched to define leak channels with consistent shapes and sizes, allowing for precise control and calibration of leak rates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional reference leaks (platinum wire-glass, squeezed metal tube, or silica membrane) are used, then a reference leak can be obtained, but the leak gaps are randomly formed and uncontrollable, leading to temperature sensitivity and calibration uncertainties
Solution Approach 1:
The leak channels are pre-defined through precise manufacturing processes (drilling, etching, or forming) before assembly, ensuring controlled dimensions and shapes. This preliminary structuring eliminates random gap formation and provides predictable leak rates that are not sensitive to temperature variations
Solution Approach 2:
The invention changes the fundamental parameter of leak channel geometry from random/uncontrolled to precisely controlled with specific dimensions (width w, length L, depth d). By controlling these geometric parameters during manufacturing, the leak rate becomes predictable and stable across different temperatures
2Ease of manufacture
If platinum wire-glass leak with unmatched sealing method is used, then a reference leak is obtained, but multiple random leak gaps are formed at the interface, making leak rate unpredictable
Solution Approach 1:
The invention extracts and eliminates the problematic interface region between dissimilar materials (platinum wire and glass) that causes random leak gaps. By using matched materials or alternative sealing methods that create uniform interfaces, the random gap formation is removed while maintaining manufacturing feasibility
Solution Approach 2:
The invention uses composite structures with carefully selected material combinations that have matched thermal expansion coefficients and compatible sealing properties. This ensures that the interface between components forms uniform, predictable seals rather than random gaps, improving both manufacturability and precision
3Ease of manufacture
If squeezed metal tube leak is used, then a reference leak is obtained, but the leak gaps are formed by hydraulic pressure and are unpredictable, requiring calibration by other instruments
Solution Approach 1:
Instead of forming leak gaps through unpredictable hydraulic squeezing, the invention pre-defines the leak channel geometry through controlled manufacturing processes. The channels are created with specific dimensions before assembly, eliminating the need for post-manufacturing calibration and improving measurement accuracy
4Adaptability or versatility
If silica membrane helium leak is used, then a porous reference leak is obtained, but the leak rate is unpredictable and temperature sensitive, requiring calibration
Solution Approach 1:
The invention changes the approach to achieving gas selectivity from relying on unpredictable porous membrane formation to using controlled non-porous channels with precise geometric parameters. The leak rate is controlled by channel dimensions rather than random pore structures, eliminating temperature sensitivity while maintaining gas detection capability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables accurate and predictable leak rates, reducing temperature sensitivity and calibration uncertainties, allowing for precise leak detection and calibration of instruments like helium mass spectrometers.
Implementation Method 1
Oblique walls of the leak channels are formed by crystal planes of the at least one of the first and second substrates
Data Source
AI summary
A reference leak (10) includes a first substrate (20), a second substrate (40) disposed and bonded on the first substrate, and predetermined numbers of leak channels (14) defined in at least one of the first and second substrates. Oblique walls of the leak channels are formed by crystal planes of the at least one of the first and second substrates, the oblique walls thereby being aligned according to such crystal planes. A method for making a reference leak is also provided.