Reference Optical Window Elements for Metrology Calibration
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Solution Overview
Problem
Optical metrology systems face challenges in accurately compensating for distortions and aberrations introduced by components such as optics, 2D beam scanners, and exit windows, which affect the calibration and accuracy of distance and angle measurements.
Innovation Solution
Incorporation of reference optical elements on the window of the metrology system to return a portion of a calibration light beam, allowing processors to determine optical path length and angle information, enabling compensation for distortions and aberrations, thereby improving measurement accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If reference optical elements are added to compensate for distortions and aberrations, then measurement precision is improved, but device complexity increases
Solution Approach 1:
Reference optical elements (such as reference mirrors or retroreflectors) are introduced as intermediary components on the window surface. These elements serve as mediators that reflect calibration light beams back to sensors, enabling the system to measure and compensate for distortions and aberrations introduced by the window and other optical components without requiring complex internal calibration mechanisms.
Solution Approach 2:
The system implements a feedback mechanism where calibration light beams are directed to reference optical elements, and the reflected beams are detected by sensors. The measured deviations from expected optical paths are fed back to the processing system, which then applies correction algorithms to compensate for the identified distortions and aberrations in subsequent measurements.
2Manufacturing precision
If reference optical elements are disposed on the window, then calibration accuracy is improved, but manufacturing complexity increases
Solution Approach 1:
Reference optical elements are pre-positioned and fixed on the window surface during the manufacturing process. This preliminary action ensures that the reference elements are accurately located before the window is assembled into the final device, simplifying the overall manufacturing process while maintaining high calibration accuracy. The reference elements serve as built-in calibration standards that are already in place when the device is manufactured.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances the accuracy of distance measurements and geometry determination by compensating for unwanted effects caused by optical components, ensuring precise calibration and improved measurement performance.
Implementation Method 1
each reference optical element is configured to return to the internal environment of the metrology system a portion of a calibration light beam that originates from the internal environment of the metrology system and impinges on the reference optical element
Data Source
AI summary
A metrology system includes a window and one or more reference optical elements. The window is configured to permit transmission, via a clear aperture of the window, of a measurement light beam from an internal environment of the metrology system to an external environment. The one or more reference optical elements are disposed on the window. Each reference optical element, of the one or more reference optical elements, is configured to return, to the internal environment of the metrology system, a portion of a calibration light beam that originates from the internal environment of the metrology system and impinges on the reference optical element.