Refillable Sublimation Vessel with Flow Restricting Structure
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Solution Overview
Problem
Existing solid chemical delivery systems for substrate processing equipment face challenges such as low saturation of sublimed material due to short carrier gas residence time and significant tool downtime for refilling and cooling of sublimation vessels, along with the expense and complexity of large sublimation vessels and heated delivery lines.
Innovation Solution
A refillable sublimation vessel system with a central refill port, gas inlet and outlet ports, and a flow restricting structure to increase carrier gas residence time, allowing for in-place refilling without cooling, and reducing the need for large, expensive vessels and heated delivery lines.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If a carrier gas is flowed through the sublimation vessel, then the solid precursor is sublimed to form process gases, but the low residence time of carrier gas provides lower saturation of sublimed material
Solution Approach 1:
The sublimation vessel is divided into multiple compartments by internal baffles, creating a tortuous flow path that segments the carrier gas flow. This segmentation increases the effective residence time by forcing the gas to traverse a longer, more complex path through the vessel, thereby improving saturation of sublimed material without requiring a larger overall vessel volume.
Solution Approach 2:
The patent introduces vertical and radial flow components by positioning gas inlet and outlet ports at different locations and angles. The carrier gas flow is transformed from a simple linear path to a multi-dimensional tortuous path, increasing residence time through spatial reconfiguration rather than temporal extension.
2Ease of operation
If the solid precursor is depleted from the sublimation vessel, then the vessel needs to be cooled and removed for refilling, but this results in tool downtime
Solution Approach 1:
The sublimation vessel is designed with a removable lid and compatible refill cartridge system, allowing the precursor material to be pre-loaded into replaceable cartridges. When the precursor is depleted, the entire cartridge can be quickly removed and replaced without cooling or disassembly, enabling continuous operation.
Solution Approach 2:
The precursor material is extracted from the main vessel body into a separate, removable refill cartridge. This extraction allows the vessel to remain in place while the depleted cartridge is removed for replacement, eliminating the need to cool or disassemble the vessel itself during refilling operations.
3Quantity of substance
If extremely large sublimation vessels are used, then the solid precursor capacity is increased, but the vessels are expensive and require long heated delivery lines
Solution Approach 1:
The precursor storage is segmented into a compact vessel body and a separate refill cartridge. This segmentation allows the vessel to maintain a small, manageable size that does not require extensive heated delivery lines, while the refill cartridge provides additional precursor capacity when needed. The modular design reduces system complexity compared to a single large vessel.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enhances the saturation of sublimed material in the carrier gas stream, reduces tool downtime, and allows for the use of smaller, less expensive vessels, while maintaining efficient chemical delivery to process chambers.
Implementation Method 1
a flow restricting structure disposed in an upper portion of the interior volume... comprising at least one of a plurality of baffles defining a tortuous flow path
Implementation Method 2
A heater may be coupled to at least one of a sidewall of the vessel body, the vessel lid, or the bottom plate of the vessel body... to sublime the solid precursor
Data Source
AI summary
Embodiments of a solid chemical delivery system having a refillable sublimation vessel are provided herein. In some embodiments, a solid chemical delivery system includes: a refillable sublimation vessel including: a vessel body coupled to a vessel lid to define an interior volume of the refillable sublimation vessel, wherein the vessel lid includes a central refill port, a gas inlet port, and a gas outlet port; a flow restricting structure disposed in an upper portion of the interior volume; and a vertical appendage disposed in the interior volume and extending from a bottom plate of the vessel body; a refill cartridge removably coupled to the central refill port of the refillable sublimation vessel and having an internal volume therein; and a first valve disposed between the refillable sublimation vessel and the refill cartridge.