Reflective Dynamic Metasurface Pixel Phase Modulation

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Solution Overview

Problem

Conventional metasurfaces lack the concept of 'pixels' for precise phase modulation, particularly in two-dimensional arrays, making it difficult to achieve local phase adjustment in arbitrary regions.

Innovation Solution

A reflective dynamic metasurface with a laminated structure comprising a first and second metal film, a transparent conductive layer, and a dielectric layer, where a drive circuit controls the voltage between the metal films to modulate the phase of light in each pixel, enabling independent phase control in a one-dimensional or two-dimensional array.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a conventional metasurface structure without pixel division is used, then the device structure is simple, but precise local phase adjustment in arbitrary regions cannot be achieved

Engineering Contradiction:
Improvephase modulation precisionVSAvoiddevice structure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The metasurface is divided into multiple independent pixel regions, with each pixel containing its own metal film structure that can be independently controlled. This segmentation enables precise local phase adjustment in arbitrary regions while maintaining overall device functionality

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Each pixel region is equipped with independent control capabilities through individual metal film structures and electrode configurations. This allows different phases to be applied to different pixels, achieving local quality variation and precise phase modulation in specific areas without affecting other regions

Inventive Principle:
Principle #3Local quality

2Adaptability or versatility

If a static metasurface with fixed metal film width is used, then the manufacturing process is simple, but dynamic phase control cannot be achieved

Engineering Contradiction:
Improvephase control flexibilityVSAvoidmanufacturing simplicity
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The metasurface transitions from a static structure with fixed metal film widths to a dynamic structure where metal film effective widths are controlled by applied voltages. The metal-insulator-metal cavity structure allows the effective refractive index to change dynamically with voltage, enabling real-time phase modulation

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The effective refractive index of the metal-insulator-metal cavity is changed by varying the applied voltage, which modifies the electron density and metallization state of the transparent conductive layer. This parameter change enables dynamic control of the phase without altering the physical dimensions of the structure

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If the metal film width is increased to improve phase control range, then the phase modulation capability is enhanced, but the device thickness increases

Engineering Contradiction:
Improvephase modulation capabilityVSAvoiddevice thickness
Core Design Contradiction:
Manufacturing precisionVSLength of stationary object

Solution Approach 1:

The phase control mechanism transitions from relying on in-plane metal film width variations to utilizing the vertical dimension through voltage-controlled metallization of the transparent conductive layer. The effective refractive index is modulated by changing the electron density in the vertical direction, allowing phase control without increasing device thickness

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for precise phase modulation in each pixel, enabling thinner and more miniaturized devices with high-speed operation, comparable to or exceeding conventional diffractive optical elements and liquid crystal spatial light modulators.

Implementation Method 1

The second metal film reflects, towards the first surface, the light passing through the first surface

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

metallization (state where the electron density becomes concentratively high near the interface between the dielectric layer and the transparent conductive layer) of a part of the transparent conductive layer occurs due to an electric field between the lower metal film and the upper metal film

Methodology Applied
Scientific EffectElectrical Field: Electric Field

Implementation Method 3

the effective refractive index between the lower metal film and the upper metal film changes according to the thickness of the metallized layer

Methodology Applied
Scientific EffectEffective refractive index change: Refraction

Data Source

PatentUS11971643B2Reflective dynamic metasurface
Publication Date: 2024.04.30 HAMAMATSU PHOTONICS KK
  • US11971643B2 patent drawing
  • US11971643B2 patent drawing
  • US11971643B2 patent drawing

AI summary

A reflective dynamic metasurface of an embodiment comprises a structure enabling phase modulation in each of pixels constituting at least a one-dimensional array. The metasurface includes: a laminated structure body having a transparent conductive layer and a dielectric layer; a first metal film on one surface of the laminated structure body; a second metal film on the other surface of the laminated structure body; and a drive circuit controlling voltage applied between the first and second metal films. The first and second metal films are arranged to sandwich the pixels. The first metal film is arranged to expose a pair of window regions in one pixel, and the second metal film includes partial metal films defining the shape of each pixel and separated from each other. The drive circuit individually controls the potential of each partial metal film, thereby modulating the phase of the input light for each pixel.