Reflective Deposition Mask Structure for Pixel Alignment Stability

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Thermal deformation of deposition masks during the deposition process for high-resolution display panels, such as those required for wearable devices like AR glasses, leads to reduced pixel position accuracy, which is critical for maintaining high resolution and preventing user discomfort.

Innovation Solution

Incorporation of reflective patterns made of metal or metal oxides on the inner surfaces of cell openings within the deposition mask, which reflect thermal radiation energy, reducing thermal deformation and maintaining pixel accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If the deposition mask is heated by thermal radiation energy from the deposition source, then the deposition process can proceed, but thermal deformation of the deposition mask occurs causing pixel position accuracy to deteriorate

Engineering Contradiction:

Improvethermal radiation energyVSAvoidpixel position accuracy

Core Design Contradiction:

TemperatureVSManufacturing precision

Solution Approach 1:

The patent applies reflective patterns made of metal or metal oxide on the inner surfaces of cell openings to reflect thermal radiation energy back toward the deposition source, converting the harmful thermal effect into a beneficial controlled heating process. This reduces net thermal deformation of the mask while maintaining deposition efficiency

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The patent changes the thermal optical parameters of the deposition mask by adding reflective patterns with specific reflectivity properties. These patterns modify how thermal radiation interacts with the mask structure, reducing heat absorption and subsequent thermal deformation, thereby maintaining pixel position accuracy

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The reflective patterns effectively reduce thermal deformation, ensuring high pixel position accuracy and enabling the production of high-resolution display panels suitable for wearable devices without causing user discomfort.

Implementation Method 1

reflective patterns disposed on inner surfaces of the cell openings and reflecting thermal radiation energy

Methodology Applied

Scientific EffectThermal radiation: Thermal Radiation

Implementation Method 2

reflective patterns disposed on inner surfaces of the cell openings and reflecting thermal radiation energy

Methodology Applied

Scientific EffectReflection: Reflection

Data Source

PatentUS20260035778A1Deposition mask, deposition apparatus including the same, method of manufacturing the same, and electronic device manufactured by using the same

Publication Date: 2026.02.05 SAMSUNG DISPLAY CO LTD

AI summary

Provided are a deposition mask, a deposition apparatus including the same, a method of manufacturing the same, and an electronic device manufactured by using the same. The deposition mask includes a mask frame having cell openings and including a rib region defining the cell openings, a membrane including mask cell regions each disposed on the cell openings, and reflective patterns disposed on inner surfaces of the cell openings and reflecting thermal radiation energy.