Reflective Optical Element Cavity Cooling Method
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Solution Overview
Problem
Existing methods for producing reflective optical elements with integrated cavities for cooling often compromise the optical properties of the elements, are complex, and can lead to detachment issues under pressure or vacuum conditions, especially when dealing with high-thermal-load applications like EUV or X-ray spectral ranges.
Innovation Solution
A method involving a substrate with a cavity introduced from one surface, followed by overcoating and application of a reflective layer, where the cavity is filled with a removable material that can be easily liquefied or dissolved, allowing for precise machining and minimizing interference with the optical layer, and using materials like copper or nickel for overcoating to enhance durability and machinability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the cavity is introduced into the substrate after the optical layer is applied, then the cooling function is achieved, but the optical properties of the optical layer are impaired and the optical layer can be undesirably deformed
Solution Approach 1:
The cavity is introduced into the substrate before the optical layer is applied, rather than after. This preliminary action prevents subsequent deformation of the optical layer while still achieving the cooling function, as the cavity structure is already in place to guide coolant flow through the substrate during optical element operation
2Reliability
If prefabricated cooling lines are applied to the rear side of the optical layer by soldering or electroplating, then the cooling function is achieved, but the production process becomes comparatively complicated
Solution Approach 1:
The cooling lines are merged with the substrate during the substrate production process itself, rather than being applied as separate prefabricated components. This integration eliminates the need for subsequent soldering or electroplating steps, simplifying the production process while maintaining the cooling function
3Ease of manufacture
If the reflective optical element is produced from two shells connected by soldering or adhesive bonding, then the cavity can be introduced, but the shells can detach from each other under pressure or vacuum conditions
Solution Approach 1:
The substrate is designed as a single integrated piece with the cavity formed within it, rather than assembling two separate shells. This segmentation approach eliminates the interface between shells that would be prone to detachment, while still allowing the cavity to be introduced through processes like injection molding or precision machining of the single substrate
4Reliability
If conventional methods are used to introduce cavities into reflective optical elements, then cooling is achieved, but the methods are complicated and not compatible with high-precision optically effective surfaces
Solution Approach 1:
The cavity is introduced into the substrate in a localized manner that does not affect the optically effective surface. The substrate is designed so that the cavity formation process (such as injection molding or selective removal) occurs in non-critical regions, preserving the high-precision optical surfaces while providing effective cooling pathways in the substrate regions that do not require optical precision
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for the production of reflective optical elements with improved optical integrity, reduced complexity, and enhanced resistance to detachment, enabling effective cooling and precise surface manipulation, particularly suitable for high-precision aspheric or free-form surfaces in high-thermal-load environments.
Implementation Method 1
d) applying an overcoating to the first surface, even in the region of the at least one cavity, by galvanic and/or chemical deposition of at least one layer made of at least one third material
Implementation Method 2
d) applying an overcoating to the first surface, even in the region of the at least one cavity, by galvanic and/or chemical deposition of at least one layer made of at least one third material
Implementation Method 3
applying at least one reflective layer to the overcoating, wherein step f) is carried out before step e) or after step e)
Data Source
AI summary
The disclosure provides a method that includes filling a cavity in a substrate with a second material, wherein the substrate includes a first material. The method also includes using galvanic and/or chemical deposition of a third material to apply an overcoating to a first surface of the substrate in a region of the cavity. The method further includes removing the second material from the cavity. In addition, the method includes, before or after removing the second material from the cavity, applying a reflective layer to the overcoating. The disclosure also provides related optical articles and systems.