Reflective Plate with Differential Reflectivity for Thin Film Deposition
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Solution Overview
Problem
Existing thin film forming technologies for display devices face challenges in managing heat reflection and absorption efficiently, leading to potential damage to substrates during the thin film deposition process.
Innovation Solution
A thin film forming apparatus is designed with a front heatsink featuring a reflective plate with distinct reflectivity surfaces, where the first surface has high reflectivity and the second surface has low reflectivity, along with a cover plate to absorb heat, effectively reducing heat transmission to the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a reflective plate with uniform high reflectivity is used to prevent heat transmission to the substrate, then substrate damage is prevented, but heat reuse efficiency is reduced
Solution Approach 1:
The reflective plate is designed with different reflectivity values at different surfaces: the first surface (facing the source material) has high reflectivity (90% or higher) to reflect heat back to the source material for reuse, while the second surface (facing the substrate) has low reflectivity (10% or lower) to allow heat to pass through to the substrate. This local differentiation of optical properties resolves the contradiction by optimizing heat management at each interface separately.
2Productivity
If heat is reflected back to the source material to improve evaporation efficiency, then productivity increases, but heat accumulation near the crucible increases
Solution Approach 1:
The first surface of the reflective plate facing the source material has high reflectivity (90% or higher) to reflect heat back to the source material, improving evaporation efficiency and productivity. The second surface has low reflectivity (10% or lower) to allow heat to pass through to the substrate, preventing excessive heat accumulation near the crucible. This differential reflectivity design enables simultaneous achievement of high productivity and controlled temperature distribution.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution efficiently reuses and absorbs heat, preventing damage to substrates and maintaining the integrity of thin films formed on them.
Implementation Method 1
the reflective plate has a first surface with a first reflectivity and a second surface with a second reflectivity... At least some of heat released from the crucible may be reflected by the first surface
Implementation Method 2
at least some of heat penetrating the first reflective plate and reflected by the cover plate may be absorbed by the second surface
Implementation Method 3
forming a thin film on a substrate by evaporating the source material of the thin film forming apparatus
Data Source
AI summary
A method of manufacturing a display device is provided. A method of manufacturing a display device comprises preparing a thin film forming apparatus including a crucible, which stores a source material for forming a thin film, and a front heatsink, which is disposed on the crucible and includes a reflective plate, wherein the reflective plate has a first surface with a first reflectivity and a second surface with a second reflectivity, which is different from the first reflectivity; and forming a thin film on a substrate by evaporating the source material of the thin film forming apparatus.