Reflective Spatial Light Modulator Charge Injection Curbing

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Solution Overview

Problem

In electro-optical elements with a KTN layer, the stability of modulation accuracy is compromised due to charge injection from metal electrodes, especially when multiple electrodes are arrayed, leading to signal mixing and reduced accuracy.

Innovation Solution

A reflective spatial light modulator is designed with a perovskite-type electro-optic crystal and charge injection curbing layers made of non-conductive adhesive materials on both surfaces, preventing charge injection and signal mixing, while maintaining a high relative dielectric constant for effective modulation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conductivity is applied to a seed layer by adding a conductive substance, then electrical connection between metal electrode and KTN layer is achieved, but charge injection into the KTN layer occurs causing unstable modulation accuracy

Engineering Contradiction:
Improveelectrical connection stabilityVSAvoidmodulation accuracy
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The patent introduces a charge injection curbing layer as an intermediary between the metal electrode and the KTN layer. This layer has intermediate conductivity that allows electrical connection while preventing excessive charge injection into the KTN layer, thereby resolving the contradiction between achieving electrical connection and preventing charge injection that degrades modulation accuracy

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent changes the conductivity parameter of the seed layer by controlling the concentration of conductive substances within a specific range (10^-6 to 10^-3 S/cm). This parameter optimization allows the seed layer to provide sufficient electrical connection while limiting charge injection into the KTN layer, thus maintaining stable modulation accuracy

Inventive Principle:
Principle #35Parameter changes

2Productivity

If multiple metal electrodes are formed in an array shape with conductive seed layer, then electro-optical element array is created, but electrical signals input to the electrodes become mixed

Engineering Contradiction:
Improveelectrode array formationVSAvoidsignal separation accuracy
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The charge injection curbing layer acts as an intermediary that electrically isolates adjacent electrodes while maintaining individual electrode functionality. This prevents signal mixing between adjacent electrodes in the array, allowing each electrode to independently control its corresponding KTN region without interference from neighboring electrodes

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent segments the conductive path into distinct regions by introducing the charge injection curbing layer between adjacent electrodes. This segmentation creates electrically isolated zones for each electrode, preventing signal crosstalk while maintaining the array structure for high productivity

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution stabilizes modulation accuracy by preventing signal mixing between electrodes and ensuring precise electrical signal application, enhancing the overall performance of the spatial light modulator.

Implementation Method 1

a perovskite-type electro-optic crystal having an input surface to which the input light is input and a rear surface opposing the input surface, and having a relative dielectric constant of 1,000 or higher

Methodology Applied
Scientific EffectElectro-optic effect: Electro-Optic Effects

Implementation Method 2

a light reflection unit including a substrate on which a plurality of second electrodes are disposed, being disposed on the rear surface side of the electro-optic crystal, and reflecting the input light toward the light input/output unit

Methodology Applied
Scientific EffectLight reflection: Reflection

Data Source

PatentUS11391970B2Reflective spatial light modulator, optical observation device, and light irradiation device
Publication Date: 2022.07.19 HAMAMATSU PHOTONICS KK
  • US11391970B2 patent drawing
  • US11391970B2 patent drawing
  • US11391970B2 patent drawing

AI summary

A reflective spatial light modulator includes an electro-optic crystal having an input surface to which input light is input and a rear surface opposing the input surface, a light input/output unit being disposed on the input surface of the electro-optic crystal and having a first electrode through which the input light is transmitted, a light reflection unit including a substrate including a plurality of second electrodes and being disposed on the rear surface side of the electro-optic crystal, and a drive circuit applying an electric field between the first electrode and the plurality of second electrodes. The light input/output unit includes a first charge injection curbing layer formed on the input surface, and the light reflection unit includes a second charge injection curbing layer formed on the rear surface.