Artifact-Free Macroscopic Inspection of Reflective Specimens
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Solution Overview
Problem
Macroscopic inspection systems face challenges in imaging reflective specimens due to reflection artifacts and illumination hot spots, which hinder accurate imaging and feature detection in specimens like semiconductor wafers and biological slides.
Innovation Solution
An inspection apparatus with a specimen stage, imaging devices, and a control system that captures images from different sides of a reference point, crops out imaging artifacts, and digitally stitches them to create artifact-free composite images, while also adjusting illumination profiles based on specimen classification.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional imaging systems are used to capture images of reflective specimens, then the imaging process is simple and direct, but reflection artifacts and illumination hot spots appear in the captured images
Solution Approach 1:
The imaging process is divided into multiple captures from different positions around the specimen. The system takes multiple images at different angular positions and combines them, segmenting the harmful reflections from the useful specimen information through spatial separation
Solution Approach 2:
The system extracts and removes reflection artifacts and illumination hot spots from the captured images through image processing algorithms. The harmful elements are identified and extracted from the image data, leaving only the clean specimen information
2Reliability
If multiple images are captured and digitally stitched to eliminate artifacts, then image quality improves, but the inspection time increases
Solution Approach 1:
The system uses periodic rotation of the specimen or imaging head to capture images at multiple predetermined angular positions. This periodic motion enables systematic collection of artifact-free image data while maintaining efficient timing through automated sequencing
Solution Approach 2:
The system performs preliminary image captures at multiple positions before final image reconstruction. By pre-capturing all necessary images and performing artifact removal in advance, the system prepares clean image data ready for immediate analysis without delays during the inspection process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively eliminates reflection artifacts and illumination hot spots, providing clear, artifact-free images of reflective specimens across various illumination modes, enhancing feature detection and analysis.
Implementation Method 1
the reflection of an imaging device positioned above the specimen can reflect off of the specimen and appear in the image captured by the imaging device
Data Source
AI summary
An inspection apparatus includes a specimen stage, one or more imaging devices and a set of lights, all controllable by a control system. By translating or rotating the one or more imaging devices or specimen stage, the inspection apparatus can capture a first image of the specimen that includes a first imaging artifact to a first side of a reference point and then capture a second image of the specimen that includes a second imaging artifact to a second side of the reference point. The first and second imaging artifacts can be cropped from the first image and the second image respectively, and the first image and the second image can be digitally stitched together to generate a composite image of the specimen that lacks the first and second imaging artifacts.