Selective Reflector Disk Coating for RTP Pyrometer Reflectivity
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Solution Overview
Problem
State-of-the-art reflector plates for rapid thermal processing (RTP) incur high costs due to mismatched reflectivity requirements and complex multi-layer coatings that can crack or peel, compromising energy efficiency and heating performance.
Innovation Solution
A reflector plate assembly with selectively coated reflector disks and bare polished surfaces, using gold or chromium coatings encapsulated with silicon oxide or sapphire, enhances emissivity and reduces metal contamination, while maintaining high reflectivity at pyrometer wavelengths.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If complex multi-layer coatings are applied over the entire reflector plate to optimize energy savings and heating performance, then reflectivity at pyrometer wavelengths is improved, but manufacturing cost increases and reliability deteriorates due to cracking and peeling at elevated temperatures
Solution Approach 1:
The reflector plate is segmented into multiple zones with different coating configurations. Specifically, a first zone contains a first coating optimized for pyrometer wavelength reflectivity, while a second zone contains a second coating optimized for thermal radiation reflection. This segmentation allows each zone to perform its specific function without the entire plate requiring complex multi-layer coatings, thereby reducing manufacturing cost and improving reliability by limiting the coated areas to where they are most needed.
Solution Approach 2:
Different regions of the reflector plate are assigned different coating properties tailored to their specific functions. The first zone (containing the pyrometer aperture) receives a coating optimized for pyrometer wavelength reflectivity, while the second zone receives a coating optimized for thermal radiation reflection. This local quality approach ensures that each area has the appropriate optical properties for its purpose, avoiding the need for complex multi-layer coatings across the entire plate.
2Loss of energy
If complex multi-layer coatings are applied over the entire reflector plate to optimize energy savings and heating performance, then heating performance is improved, but manufacturing cost increases
Solution Approach 1:
The reflector plate is divided into functional zones with different coating requirements. Only specific zones (first and second zones) receive coatings, while other areas remain uncoated or receive simpler coatings. This segmentation reduces the total amount of coating material and manufacturing complexity compared to coating the entire plate, thereby lowering manufacturing cost while maintaining heating performance through the strategically coated zones.
Solution Approach 2:
Coatings are applied locally to specific zones where they are most needed rather than uniformly across the entire plate. The first zone has coating optimized for pyrometer wavelengths, and the second zone has coating optimized for thermal radiation. This localized approach reduces material costs and manufacturing complexity while achieving the desired heating performance through the functionally optimized zones.
3Loss of energy
If uniform reflector plates with optimized reflectivity are used, then energy efficiency is improved, but device complexity increases due to optical stack requirements
Solution Approach 1:
Instead of using a complex optical stack across the entire reflector plate, the solution segments the plate into zones with simpler, single-function coatings. The first zone has a coating for pyrometer wavelength reflectivity, and the second zone has a coating for thermal radiation reflection. This segmentation replaces the need for complex multi-layer optical stacks with simpler, zone-specific coatings, thereby reducing device complexity while maintaining energy efficiency.
4Ease of manufacture
If reflector plates with limited coated areas are used to reduce cost, then manufacturing cost is reduced, but reflectivity performance deteriorates
Solution Approach 1:
Coatings are applied to specific zones where they provide the most value: the first zone (with pyrometer aperture) receives coating optimized for pyrometer wavelength reflectivity, and the second zone receives coating optimized for thermal radiation reflection. This local quality approach ensures that coatings are placed only where they are needed for optimal performance, avoiding unnecessary coating of areas where it would not contribute to reflectivity performance, thereby maintaining cost-effectiveness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution improves reliability, reduces manufacturing and replacement costs, and enhances energy efficiency by optimizing reflectivity and temperature control in RTP processes.
Implementation Method 1
The coating of the reflector disks with gold (Au) or chromium (Cr) enhances emissivity of the reflector disks
Implementation Method 2
The coating on the reflector disks is further encapsulated with silicon oxide (SiO2) or sapphire to reduce metal contamination
Implementation Method 3
a reflector plate having a first surface, wherein the first surface is a bare polished surface... high reflectivity at pyrometer wavelengths
Data Source
AI summary
A reflector plate assembly for processing a substrate includes a reflector plate having a first surface, wherein the first surface is a bare polished surface, a reflector disk embedded within the reflector plate from the first surface, a coating layer on the reflector disk, and a pyrometer disposed through an opening of the reflector disk.