Refractive Element in Cover for Infrared Detection

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Solution Overview

Problem

Existing optoelectronic devices for infrared radiation detection face challenges in efficiently directing and focusing electromagnetic radiation, leading to suboptimal detection efficiency and sensitivity, particularly due to limitations in refractive elements and manufacturing processes.

Innovation Solution

The optoelectronic device incorporates a refractive element formed within a cover element's rear surface, creating a cavity with a detection element, and optionally includes an intermediate layer and getter layer to enhance radiation directionality and detection efficiency, using a method that involves through-substrate interconnections and advanced surface structuring techniques like etching and reflow layer processing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If radiation directing elements are formed in the opposite main surface with recesses for optical components, then radiation directionality is improved, but device complexity and manufacturing difficulty increase

Engineering Contradiction:

Improvemanufacturing simplicityVSAvoidradiation directionality

Core Design Contradiction:

Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent inverts the conventional approach by forming the refractive element on the same main surface as the detection element rather than on the opposite surface. This inversion simplifies the manufacturing process by eliminating the need for complex through-substrate vias and multi-surface alignment, while still achieving effective radiation directionality through the refractive element's positioning above the detection plane.

Inventive Principle:

Principle #13The other way round (Inversion)

Solution Approach 2:

The patent merges the detection element and refractive element onto the same substrate surface, combining functions that were traditionally separated in different layers or surfaces. This integration simplifies the overall device structure and manufacturing process while maintaining the optical performance benefits of having both elements in close proximity for effective radiation detection and directionality.

Inventive Principle:

Principle #5Merging (Combining)

2Device complexity

If refractive elements are integrated with detection elements on the same substrate, then manufacturing complexity is reduced, but protection from environmental contaminants becomes more difficult

Engineering Contradiction:

Improvestructural complexityVSAvoidenvironmental contamination

Core Design Contradiction:

Device complexityVSObject-affected harmful factors

Solution Approach 1:

The patent employs a protective encapsulation layer that forms a thin film over the integrated detection and refractive elements. This protective shell shields the sensitive optical components from environmental contaminants such as moisture and dust, while the thin-film design minimizes interference with the optical path and maintains the compact integrated structure.

Inventive Principle:

Principle #30Flexible shells and thin films

3Reliability

If through-substrate vias are used to connect detection elements, then electrical connectivity is achieved, but manufacturing precision and alignment difficulty increase

Engineering Contradiction:

Improveelectrical connectivityVSAvoidalignment precision

Core Design Contradiction:

ReliabilityVSManufacturing precision

Solution Approach 1:

The patent implements through-substrate vias and electrical interconnections during the early stages of substrate fabrication, before the refractive element is formed. This preliminary action ensures that electrical connectivity is established with proper alignment and reliability, and subsequent processing steps can proceed without compromising the precision of the electrical connections.

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration improves electromagnetic radiation detection efficiency, reduces chromatic aberration, and enhances sensitivity, particularly for infrared radiation, while protecting the refractive element from environmental contaminants and facilitating manufacturing through one-sided wafer processing.

Implementation Method 1

A refractive element, which is provided to direct the propagation of electromagnetic radiation, is arranged above the detection element. The refractive element is formed by a portion of the cover element at the rear surface of the cover element.

Methodology Applied

Scientific EffectRefraction: Refraction

Data Source

PatentUS10644047B2Optoelectronic device with a refractive element and a method of producing such an optoelectronic device

Publication Date: 2020.05.05 AUSTRIAMICROSYSTEMS AG

AI summary

A top surface of a substrate is provided with a detection element for detecting electromagnetic radiation. A refractive element is formed by a portion of a cover element, which is attached to the substrate, so that the refractive element is arranged facing the detection element. The refractive element may be arranged within a recess of the cover element, so that a cavity is formed between the detection element and the refraction element.