Refractory Metal Ion Implanter Component with Composite Coating
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Solution Overview
Problem
Ion implanter components face challenges with wear and contamination due to thermal, chemical, and mechanical stress, leading to reduced operating times and increased maintenance costs, with existing coatings often detaching and causing further contamination.
Innovation Solution
The use of refractory metal components with a composite layer consisting of borides, carbides, and nitrides, particularly those containing tungsten or molybdenum, which are formed through heat treatment with carbon, boron, and nitrogen, providing enhanced adhesion and resistance to plasma and ion beam stress.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If components are made from temperature-resistant materials like tungsten or molybdenum, then resistance to thermal stress is improved, but wear and material removal due to chemical and mechanical erosion still occur, reducing service life
Solution Approach 1:
The patent applies composite materials by coating refractory metal components with layers of erosion-resistant materials such as tungsten carbide, tantalum carbide, or silicon carbide. This composite structure combines the high-temperature resistance of the refractory metal base with the superior erosion resistance of the carbide coating, thereby reducing material removal while maintaining thermal stress resistance.
Solution Approach 2:
The patent changes the surface properties of the refractory metal components by applying protective coatings with different chemical and mechanical properties. These coatings have higher resistance to chemical and mechanical erosion, effectively reducing material removal from the component surfaces while the underlying refractory metal maintains thermal stability.
2Reliability
If existing coatings are applied to protect components, then resistance to plasma and ion beam stress is improved, but the coatings detach due to poor adhesion, causing contamination
Solution Approach 1:
The patent uses composite material systems where the coating layer is chemically and mechanically bonded to the refractory metal substrate. The specific combination of refractory metal base with carbide coatings creates a metallurgically sound interface that prevents coating detachment, thereby eliminating contamination from peeling coatings while maintaining protection against plasma and ion beam stress.
Solution Approach 2:
The refractory metal component serves as an intermediary between the plasma/ion beam environment and the protective coating. The coating is specifically designed to adhere to this intermediary substrate, creating a stable interface that prevents detachment. The refractory metal acts as a transition layer that ensures strong bonding while withstanding the harsh plasma environment.
3Duration of action of stationary object
If component service life is extended through protective measures, then operating costs are reduced, but contamination of substrate or wafer still occurs from material removal
Solution Approach 1:
The patent extends component service life by applying erosion-resistant carbide coatings to refractory metal substrates, reducing material removal from chemical and mechanical erosion. Simultaneously, this composite structure prevents coating detachment through strong adhesion, thereby eliminating the source of contamination that would otherwise occur from peeling coatings, achieving both extended service life and contamination prevention.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly increases the service life of ion implanter components by reducing material removal and contamination, thereby extending maintenance intervals and improving operational efficiency.
Implementation Method 1
The components of the ion implanter are exposed to chemical and mechanical erosion and high thermal stress in the ion source due to the plasma
Implementation Method 2
Damage to parts occurs through thermal stress, as well as chemical and mechanical erosion
Implementation Method 3
Damage to parts occurs through thermal stress, as well as chemical and mechanical erosion
Implementation Method 4
providing enhanced adhesion and resistance to plasma and ion beam stress
Data Source
Figure 1~2
AI summary
The invention relates to an ion implanter which comprises at least one component of a refractory metal of the group W, W alloy, Mo and Mo alloy. The surface of said component comprises, at least in sections, a layer that is formed, at least in sections, by at least one compound formed by at least one element selected from the group consisting of C, B and N combined with at least one element selected from the group consisting of W and Mo.