Refrigerant Cooling Loop Layout for Stable Temperature and Cavitation Control
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Solution Overview
Problem
Existing cooling systems for semiconductor manufacturing apparatuses face challenges in stabilizing temperature fluctuations and preventing cavitation, leading to complex arrangements and control methods, particularly in managing the vapor-liquid equilibrium and pressure within the cooling circuit.
Innovation Solution
A cooling device design that includes a tank, a first path for circulating liquid-phase refrigerant, and a second path with a heater and vaporizer, allowing for phase change control and condensation without the need for a condenser on the first path, and using a throttle to manage pressure and prevent cavitation, along with a temperature controller to regulate the refrigerant temperature.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a conventional cooling system with pump, evaporator, condenser, and accumulator is used, then heat can be removed from the heat generating portion, but the system becomes complex and requires additional components like coolers or separate heating means to control pressure and temperature
Solution Approach 1:
The invention extracts and eliminates the condenser from the conventional cooling system. By using the tank to perform both storage and condensation functions, the system removes the need for a separate condenser component, thereby simplifying the overall arrangement while maintaining temperature control capability
Solution Approach 2:
The tank is designed to serve multiple functions: it acts as both a refrigerant storage container and a condensation chamber. This multi-functionality eliminates the need for separate dedicated components for each function, reducing system complexity while maintaining effective temperature control
2Reliability
If the fluid temperature at pump suction portion is decreased or pressure increased using a cooler, then cavitation is prevented, but the system requires additional components and complex control methods
Solution Approach 1:
The invention removes the cooler component from the system. Instead of using a separate cooler to prevent cavitation, the system relies on the natural pressure conditions created by the throttle device and the pump's own discharge pressure, which inherently prevents cavitation without additional components
Solution Approach 2:
The pump's discharge pressure naturally maintains sufficient pressure at the suction side to prevent cavitation, eliminating the need for external pressure control devices. The system uses its own operational characteristics to solve the cavitation problem
3Stress or pressure
If evaporative cooling is delayed until fluid reaches boiling point, then pressure is maintained, but temperature fluctuations occur and members may deform due to thermal expansion
Solution Approach 1:
The system performs preliminary cooling action before the fluid reaches the heat generating portion. The evaporator pre-cools the refrigerant, and the throttle device creates pressure drop that facilitates evaporation, ensuring cooling occurs proactively rather than waiting for boiling point conditions
Solution Approach 2:
The throttle device changes the pressure parameter of the refrigerant, creating a pressure drop that lowers the boiling point and enables evaporative cooling to occur at lower temperatures, thereby stabilizing the temperature of the heat generating portion
4Temperature
If heat is recovered from accumulator to condense fluid and decrease pressure, then temperature control is achieved, but the risk of cavitation at pump suction increases
Solution Approach 1:
The invention extracts the condensation function from the accumulator and relocates it to the tank. This eliminates the need to decrease system pressure for condensation, thereby maintaining sufficient pressure at the pump suction side and preventing cavitation while still achieving temperature control
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design simplifies the cooling system arrangement, prevents cavitation, and effectively manages temperature fluctuations by controlling the phase change of the refrigerant, ensuring stable operation and efficient heat transfer without the need for additional components like condensers or separate heating means.
Implementation Method 1
a pump (22) that circulates the liquid-phase refrigerant (12)
Implementation Method 2
a heat exchanger (26) that cools the liquid-phase refrigerant (12)
Implementation Method 3
a throttle device (34) that decreases the pressure of the liquid-phase refrigerant (12)
Implementation Method 4
a vaporizer (36) that vaporizes the liquid-phase refrigerant (12) and a cooling target (80) to be cooled by the vaporizer (36)
Implementation Method 5
the refrigerant in the vapor phase returned from the vaporizer (36) is condensed and changed into the liquid phase
Data Source
Figure 1
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AI summary
A cooling device includes a tank, a first path configured to circulate a liquid-phase refrigerant by a pump so as to extract the liquid-phase refrigerant from the tank, cool the liquid-phase refrigerant, and return the liquid-phase refrigerant to the tank, and a second path branched from the first path. The second path includes a heater configured to heat the liquid-phase refrigerant supplied from the first path, a throttle configured to decrease a pressure of the refrigerant heated by the heater, and a vaporizer configured to vaporize, by heat from a cooling target, at least part of the refrigerant having passed through the throttle, and the refrigerant having passed through the throttle being returned to the tank.