Connecting and disconnecting a cooling loop from a refrigeration system
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Solution Overview
Problem
The challenge of connecting and disconnecting a cooling loop from a refrigeration system in semiconductor processing chambers involves potential refrigerant leakage, complexity due to remote locations, and the need for efficient, reliable, and repeatable processes, especially with direct refrigerant cooling.
Innovation Solution
A control system with automatically controlled valves and a pressure sensor to manage refrigerant flow, using a compressor or dedicated pump to evacuate refrigerant, and a trace gas leak test to ensure leak-tight connections.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If direct refrigerant cooling is used to cool semiconductor wafers to ever lower temperatures, then cooling efficiency is improved, but refrigerant leakage risk increases when connecting or disconnecting the cooling apparatus
Solution Approach 1:
The system performs preliminary actions before disconnection by automatically evacuating refrigerant from the cooling apparatus and connecting it to the refrigeration system through controlled valve operations. This ensures refrigerant is removed before the cooling apparatus is disconnected, preventing leakage while maintaining the ability to achieve low temperatures.
Solution Approach 2:
The system uses pressure sensors to continuously monitor refrigerant pressure in the cooling apparatus and provides feedback to the control circuitry. This feedback enables automatic adjustment of valve positions and pump operations to maintain proper refrigerant levels and prevent leakage during connection and disconnection operations.
2Device complexity
If manual processes are used to evacuate refrigerant and test for leaks, then system complexity is reduced, but labor intensity and time consumption increase
Solution Approach 1:
The system performs self-service through automatic control circuitry that monitors pressure sensors, controls valve operations, and manages refrigerant evacuation without requiring manual intervention. The control system automatically sequences the opening and closing of valves and operates pumps to evacuate refrigerant, eliminating the need for manual labor while reducing operation time.
Solution Approach 2:
The system replaces manual mechanical operations with automated electronic control. The control circuitry uses electrical signals to actuate valves and pumps, substituting manual mechanical manipulation with electronic automation. This reduces both labor intensity and operation time while maintaining system reliability.
3Adaptability or versatility
If the cooling apparatus is disconnected regularly for maintenance or reconfiguration, then system adaptability is improved, but refrigerant leakage risk and operational complexity increase
Solution Approach 1:
Before each disconnection event, the system automatically performs preliminary evacuation of refrigerant from the cooling apparatus through controlled valve operations and pump activation. This preliminary action ensures refrigerant is contained within the refrigeration system before the cooling apparatus is disconnected, maintaining reliability even with regular reconfiguration.
Solution Approach 2:
The control system continuously monitors refrigerant pressure and provides feedback to automatically control valve and pump operations during each connection and disconnection cycle. This feedback mechanism ensures reliable refrigerant containment regardless of how frequently the cooling apparatus is reconfigured or disconnected.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures minimal manual intervention and reliable, repeatable connection and disconnection with minimal refrigerant leakage, automating the process for safe and efficient operation.
Implementation Method 1
a pressure sensor for determining a pressure of refrigerant in said cooling loop
Implementation Method 2
a pump on said refrigerant collection path for moving refrigerant from said cooling loop along said refrigerant collection path
Implementation Method 3
an inlet valve configured to selectively isolate or couple a supply path for supplying refrigerant from said refrigeration system with an inlet of said cooling loop
Data Source
AI summary
A control system for controlling the flow of refrigerant includes: an inlet valve configured to selectively isolate or couple a supply path for supplying refrigerant from a refrigeration system with an inlet of a cooling loop; an outlet valve configured to selectively isolate or couple a return path for returning refrigerant to the refrigeration system with an outlet of the cooling loop; a refrigerant collection valve configured to selectively isolate or couple a refrigerant collection path for collecting refrigerant for the refrigeration system with the cooling loop; a pressure sensor for determining a pressure of refrigerant in the cooling loop; an input for receiving cooling loop disconnect and connect commands; and control circuitry configured to receive signals from the pressure sensor and the commands from the input and to generate control signals for controlling the opening and closing of the inlet, outlet and refrigerant collection valves in response thereto.