Regenerative Cooling for Plasma Chamber Liners

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Solution Overview

Problem

Existing carbon black production processes face inefficiencies in cooling and pre-heating mechanisms, particularly in plasma-based methods where external heat exchangers lead to suboptimal plasma chamber liner temperatures and energy usage.

Innovation Solution

Incorporating a regenerative cooling system where recycle gas is used to cool the plasma chamber liner, flowing through channels within the liner, and then returned to the plasma chamber to pre-heat and create plasma, while using oxidizing gases to reduce carbon deposits and ensure uniform cooling.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If external heat exchangers are used for cooling and pre-heating, then the plasma chamber liner temperature control is achieved, but energy efficiency is reduced and thermal losses increase

Engineering Contradiction:
Improveplasma chamber liner temperatureVSAvoidenergy efficiency
Core Design Contradiction:
TemperatureVSLoss of energy

Solution Approach 1:

The cooling and pre-heating functions are merged into a single integrated regenerative heat exchanger system. The same heat exchanger cools the plasma chamber liner while simultaneously pre-heating the recycle gas, eliminating the need for separate external heat exchangers and reducing thermal losses.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The hot recycle gas that would otherwise be wasted is converted into a useful heating medium. The heat from the hot recycle gas is recovered and used to pre-heat the incoming gas and cool the liner, turning a thermal loss into a beneficial heating source.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

2Productivity

If higher plasma temperatures are used, then production efficiency increases, but liner heating becomes excessive

Engineering Contradiction:
Improveproduction efficiencyVSAvoidliner temperature
Core Design Contradiction:
ProductivityVSTemperature

Solution Approach 1:

The recycle gas acts as an intermediary heat transfer medium. It absorbs heat from the high-temperature plasma chamber liner through the regenerative heat exchanger, and then this pre-heated gas is reused in the plasma process, effectively mediating the heat transfer and protecting the liner from excessive temperatures.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The system changes the temperature parameters of the recycle gas dynamically. The recycle gas is heated to high temperatures in the plasma chamber, then cooled in the regenerative heat exchanger, and this cyclic parameter change enables sustained high plasma temperatures without permanent liner overheating.

Inventive Principle:
Principle #35Parameter changes

3Temperature

If cooling channels are added to the liner, then liner temperature control improves, but carbon deposits form in the channels

Engineering Contradiction:
Improveliner temperature controlVSAvoidcarbon deposits
Core Design Contradiction:
TemperatureVSObject-generated harmful factors

Solution Approach 1:

The regenerative heat exchanger operates continuously to pre-heat the recycle gas before it enters the cooling channels. This continuous pre-heating action prevents the temperature differential that would cause carbon condensation and deposit formation in the cooling channels.

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The system changes the temperature and composition parameters of the gas flowing through the cooling channels. By pre-heating the recycle gas and maintaining appropriate temperature parameters, the conditions for carbon deposit formation are eliminated while still achieving effective liner cooling.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for higher plasma temperatures without excessive liner heating, reducing energy costs and improving thermal efficiency by reusing energy absorbed during cooling, and maintaining uniform cooling across the liner.

Implementation Method 1

contacting the liner with or passing through the liner, at least one recycle gas to be used to create the plasma in the plasma chamber, to cool the plasma chamber liner and pre-heat the recycle gas

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

returning the pre-heated recycle gas to the plasma chamber to create the plasma

Methodology Applied
Scientific EffectHeat exchange: Heat Exchanger

Data Source

PatentUS11998886B2Regenerative cooling method and apparatus
Publication Date: 2024.06.04 MONOLITH MATERIALS INC
  • US11998886B2 patent drawing
  • US11998886B2 patent drawing
  • US11998886B2 patent drawing

AI summary

A method of cooling a liner in a plasma chamber. A recycle gas is contacted with or passed through the liner to cool the liner and pre-heat the recycle gas. The pre-heated gas is then recycled through the plasma chamber to become part of the plasma forming process. The method further comprises the liner is graphite, the recycle gas passes through at least one cooling channel present in the liner, at least one of the cooling channels are covered with at least one removable liner/channel cover, carbon deposits are formed from the presence of hydrocarbons in the recycle gas, at least one channel is formed in a spiral cooling channel pattern, at least one channel is formed in a substantially straight cooling channel pattern, and a plenum to aid in the production of an even distribution of cooling gas in the channels.