Pressure Regulator Poppet and Bellows for Stable Vessel Dispensing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Pressure-regulated fluid storage and dispensing vessels in semiconductor manufacturing experience severe pressure fluctuations during fluid dispensing, leading to flow circuitry component failure and out-of-specification fluid flow, which affects process efficiency and productivity.
Innovation Solution
A pressure regulator system with a housing, pressure-sensing assembly, damper assembly, and poppet closure assembly is designed to dampen oscillations and stabilize pressure, featuring a bellows structure with diaphragm elements, a poppet element with a hemispherical surface, and a seating structure to minimize friction and sticking, and a flow control valve to manage fluid dispensing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a pressure regulator is used to control fluid dispensing, then fluid flow is regulated, but pressure fluctuations and oscillations occur during operation
Solution Approach 1:
The patent applies beforehand cushioning by incorporating a damper assembly with a dashpot mechanism and viscous fluid filled chamber positioned between the pressure regulator and the mass flow controller. This damper assembly anticipates and cushions pressure oscillations before they reach the sensitive flow control components, preventing the harmful effects of pressure fluctuations while maintaining reliable fluid flow regulation throughout the system operation
2Reliability
If pressure fluctuations occur during fluid dispensing, then flow control becomes unstable, but adding damping components increases device complexity
Solution Approach 1:
The patent applies merging by integrating the damper assembly directly into the regulator housing structure, combining the pressure regulation function and pressure damping function into a single unified assembly. The dashpot mechanism is incorporated within the existing regulator components, and the viscous fluid filled chamber is positioned to utilize the available space within the regulator housing, thereby achieving flow control stability without proportionally increasing device complexity
Solution Approach 2:
The patent applies the intermediary principle by introducing a viscous fluid filled chamber as a mediator between the pressure regulator outlet and the mass flow controller inlet. This intermediary damping mechanism absorbs and dissipates pressure oscillations through the viscous properties of the fluid, providing flow control stability while maintaining a relatively simple overall device structure through the use of a straightforward dashpot mechanism
3Reliability
If pressure oscillations are severe, then mass flow controllers lose control, but reducing pressure regulation sensitivity may affect flow precision
Solution Approach 1:
The patent applies local quality by positioning the damping effect specifically at the location where pressure oscillations most adversely affect system performance - between the pressure regulator and the mass flow controller. The damper assembly is strategically placed to provide localized cushioning exactly where needed to protect the flow control mechanism, while the pressure regulator itself maintains its full sensitivity and precision for overall flow regulation, achieving both reliable mass flow controller operation and precise fluid flow control through targeted local damping
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively attenuates pressure fluctuations, ensuring stable fluid flow and reducing downtime by maintaining process efficiency and productivity in semiconductor manufacturing.
Implementation Method 1
a bellows structure with diaphragm elements adapted to expand and contract in response to pressure variations in the chamber
Implementation Method 2
a damper assembly adapted to dampen oscillations and stabilize movement of the pressure-sensing assembly between open and closed positions
Implementation Method 3
the poppet element having an upper hemispherical-shaped surface adapted to mate and contact the seating structure to form a seal
Data Source
AI summary
A pressure regulator device for use within a pressure-regulated fluid storage and dispensing vessel primarily in low flow, low delivery pressure applications. Regulator stiction challenges have been solved with an improved poppet assembly using different poppet element configurations as well as an improved bellows structure in the pressure-sensing assembly that provides more flexibility during contraction and expansion of the diaphragm elements.