Reinforcement Layer Hydrogen Density for Display Substrate Integrity
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Solution Overview
Problem
During the manufacturing of display devices, substrates often suffer damage or deformation when separated from carrier substrates due to heat and pressure, leading to defects and reduced efficiency.
Innovation Solution
Incorporating a reinforcement layer with a hydrogenated amorphous silicon oxide or nitride on the substrate, which has a lower hydrogen atom density and compressive residual stress, to minimize damage and deformation during separation, and optionally using multiple reinforcement layers with specific bond ratios to enhance stress management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a substrate is separated from a carrier substrate during manufacturing, then the display device can be completed, but the substrate may be damaged or deformed due to heat and pressure
Solution Approach 1:
A reinforcement layer is formed on the substrate before the substrate is separated from the carrier substrate. This preliminary structural enhancement provides mechanical support that prevents damage and deformation during the separation process and subsequent handling, allowing efficient manufacturing while maintaining substrate integrity.
Solution Approach 2:
The reinforcement layer is made from composite material systems including silicon oxide, silicon nitride, and silicon oxynitride with specifically controlled hydrogen content. This composite approach creates a material that provides both mechanical reinforcement and stress management properties, enabling the substrate to withstand manufacturing processes without damage while maintaining high productivity.
2Ease of manufacture
If heat and pressure are applied to the substrate during manufacturing, then layers can be bonded and devices assembled, but the substrate may bend or deform
Solution Approach 1:
The reinforcement layer utilizes controlled variations in hydrogen content and compositional parameters (silicon oxide/silicon nitride/silicon oxynitride ratios) to achieve specific mechanical properties. By adjusting these parameters, the layer provides appropriate stress characteristics that prevent substrate deformation under heat and pressure while still allowing necessary bonding operations.
Solution Approach 2:
The reinforcement layer is positioned specifically on the substrate surface where stress concentration occurs during manufacturing. This localized reinforcement provides targeted support to prevent bending and deformation in critical areas while allowing the rest of the substrate to maintain its natural properties for bonding operations.
3Strength
If a reinforcement layer with high hydrogen content is used, then stress management may be improved, but substrate damage and deformation increase
Solution Approach 1:
The reinforcement layer employs precisely controlled hydrogen content parameters within specific ranges (6.42 x 10^20 to 1.28 x 10^21 hydrogen atoms per cm³). This parameter optimization achieves the right balance between stress management capability and substrate protection, providing sufficient strength to prevent damage while maintaining manufacturing precision and substrate integrity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces substrate damage and deformation, minimizes manufacturing defects, and maintains the display panel's integrity, even when subjected to heat and pressure, thereby improving the manufacturing process and panel performance.
Implementation Method 1
the reinforcement layer has a lower hydrogen atom density and compressive residual stress
Data Source
Figure 1A
Figure 1B
Figure 2A
AI summary
A display device includes: a substrate; a reinforcement layer on the substrate; and a display layer comprising a barrier layer on the reinforcement layer, wherein a number of hydrogen atoms of the reinforcement layer per unit volume is less than a number of hydrogen atoms of the barrier layer per unit volume.