Relay Adjusting Data Transmission Interval in Substrate Processing
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Solution Overview
Problem
Operating multiple substrate processing apparatuses with a single operator leads to a high workload, causing processing delays or temporary stops due to data handling exceeding the transmission and processing capabilities of signal lines, storage devices, and calculation speeds.
Innovation Solution
A substrate processing system with a relay that adjusts the transmission interval of data to a second controller based on data type and load levels, distributing the load efficiently across the system to prevent overload.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If data transmission interval is shortened to improve real-time monitoring, then measurement precision is improved, but loss of energy increases and device complexity increases
Solution Approach 1:
The relay dynamically adjusts the data transmission interval based on the load level of the apparatus. When the load level is high, the transmission interval is extended to reduce energy consumption and avoid information overflow. When the load level is normal, the transmission interval is shortened to improve real-time monitoring capability. This dynamic adjustment resolves the contradiction between real-time monitoring and energy consumption.
Solution Approach 2:
The system changes the transmission interval parameter according to the load level conditions. By monitoring the load level and adjusting the transmission interval parameter accordingly, the system optimizes the balance between real-time monitoring precision and energy consumption, preventing both information overflow and unnecessary energy waste.
2Measurement precision
If data transmission interval is shortened to improve real-time monitoring, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The relay acts as an intermediary between the apparatus and the external system. It autonomously determines the transmission interval based on load level, eliminating the need for complex centralized control logic. This intermediary approach simplifies the overall system complexity while maintaining dynamic transmission interval adjustment capabilities.
3Device complexity
If all data types are transmitted at the same interval, then device complexity is reduced, but loss of information increases for critical data
Solution Approach 1:
The system applies different transmission intervals to different data types based on their criticality. Critical data (such as alarm data) is transmitted more frequently with shorter intervals, while non-critical data uses longer intervals. This local differentiation ensures that critical information is not lost while managing overall system complexity.
4Reliability
If operator monitors all apparatuses continuously, then reliability is improved, but productivity decreases due to high workload
Solution Approach 1:
The relay performs self-service by autonomously monitoring the load level and determining the appropriate transmission interval without operator intervention. This automated monitoring system reduces the operator's workload while maintaining reliable apparatus monitoring, thereby improving productivity without sacrificing reliability.
Solution Approach 2:
The system implements feedback control where the relay continuously monitors the load level and adjusts the transmission interval based on the feedback information. This automatic feedback mechanism ensures reliable monitoring while reducing operator burden, as the system self-regulates based on real-time conditions.
Data Source
AI summary
There is provided a technique that includes a plurality of substrate processing apparatuses each configured to process a substrate; a first controller installed in each substrate processing apparatus among the plurality of substrate processing apparatuses and configured to control the substrate processing apparatus; a relay configured to receive a plurality of types of data from the first controller; and a second controller configured to receive the data from the relay, wherein the relay is configured to change a transmission interval of the data to the second controller according to one of each type of the data and each first controller, or according to both of each type of the data and each first controller.